Micromechanics special issue of the micromechanics section of sensors and actuators, based on contributions revised from the technical digest of the fifteenth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-2002) ; 20 - 24 January 2002, Las Vegas, NV, USA (Elsevier, 2003)
Literaturangaben. - In: Sensors and actuators : A, Physical ; 103 (2003),1/2