Selected papers based on contributions revised from the technical digest of the 2002 Solid-State Sensors, Actuators and Microsystems Workshop: Hilton Head Island, SC, USA, 2 - 6 June 2002
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Bibliographic Details
Corporate Author: Solid State Sensors, Actuators and Microsystems Workshop Hilton Head, SC (Author)
Format: Conference Proceeding Book
Language:English
Published: Amsterdam [u.a.] Elsevier 2003
Series:Sensors and actuators : A, Physical 104,3 : Special issue
Subjects:
Item Description:Literaturangaben
Physical Description:S. 195 - 313 Ill., graph. Darst.

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