Micromechanics: special issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the fourteenth IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-2001 ) ; 21 - 25 January 2001, Interlaken, Switzerland
Saved in:
| Format: | Conference Proceeding Book |
|---|---|
| Language: | English |
| Published: |
Amsterdam [u.a.]
Elsevier
2002
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| Subjects: | |
| Item Description: | Literaturangaben. - In: Sensors and actuators : A, Physical ; 95 (2002),2/3 |
| Physical Description: | 295 S. Ill., graph. Darst. |
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| index_date | 2024-07-02T16:08:54Z |
| indexdate | 2024-07-20T04:59:20Z |
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| physical | 295 S. Ill., graph. Darst. |
| publishDate | 2002 |
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| spelling | Micromechanics special issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the fourteenth IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-2001 ) ; 21 - 25 January 2001, Interlaken, Switzerland Amsterdam [u.a.] Elsevier 2002 295 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - In: Sensors and actuators : A, Physical ; 95 (2002),2/3 Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Mikrosensor (DE-588)4561097-6 gnd rswk-swf Mikroschaltung (DE-588)4169849-6 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Mikroelektronik (DE-588)4039207-7 s DE-604 Mikroschaltung (DE-588)4169849-6 s Mikromechanik (DE-588)4205811-9 s Mikrosensor (DE-588)4561097-6 s Institute of Electrical and Electronics Engineers Sonstige (DE-588)1692-5 oth International Conference on Micro-Electro-Mechanical Systems 14 2001 Interlaken Sonstige (DE-588)10033002-2 oth |
| spellingShingle | Micromechanics special issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the fourteenth IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-2001 ) ; 21 - 25 January 2001, Interlaken, Switzerland Mikroelektronik (DE-588)4039207-7 gnd Mikrosensor (DE-588)4561097-6 gnd Mikroschaltung (DE-588)4169849-6 gnd Mikromechanik (DE-588)4205811-9 gnd |
| subject_GND | (DE-588)4039207-7 (DE-588)4561097-6 (DE-588)4169849-6 (DE-588)4205811-9 (DE-588)1071861417 |
| title | Micromechanics special issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the fourteenth IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-2001 ) ; 21 - 25 January 2001, Interlaken, Switzerland |
| title_auth | Micromechanics special issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the fourteenth IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-2001 ) ; 21 - 25 January 2001, Interlaken, Switzerland |
| title_exact_search | Micromechanics special issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the fourteenth IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-2001 ) ; 21 - 25 January 2001, Interlaken, Switzerland |
| title_exact_search_txtP | Micromechanics special issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the fourteenth IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-2001 ) ; 21 - 25 January 2001, Interlaken, Switzerland |
| title_full | Micromechanics special issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the fourteenth IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-2001 ) ; 21 - 25 January 2001, Interlaken, Switzerland |
| title_fullStr | Micromechanics special issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the fourteenth IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-2001 ) ; 21 - 25 January 2001, Interlaken, Switzerland |
| title_full_unstemmed | Micromechanics special issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the fourteenth IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-2001 ) ; 21 - 25 January 2001, Interlaken, Switzerland |
| title_short | Micromechanics |
| title_sort | micromechanics special issue of the micromechanics section of sensors and actuators based on contributions revised from the technical digest of the fourteenth ieee international workshop on micro electro mechanical systems mems 2001 21 25 january 2001 interlaken switzerland |
| title_sub | special issue of the Micromechanics section of Sensors and actuators, based on contributions revised from the technical digest of the fourteenth IEEE International Workshop on Micro Electro Mechanical Systems ( MEMS-2001 ) ; 21 - 25 January 2001, Interlaken, Switzerland |
| topic | Mikroelektronik (DE-588)4039207-7 gnd Mikrosensor (DE-588)4561097-6 gnd Mikroschaltung (DE-588)4169849-6 gnd Mikromechanik (DE-588)4205811-9 gnd |
| topic_facet | Mikroelektronik Mikrosensor Mikroschaltung Mikromechanik Konferenzschrift |
| work_keys_str_mv | AT instituteofelectricalandelectronicsengineers micromechanicsspecialissueofthemicromechanicssectionofsensorsandactuatorsbasedoncontributionsrevisedfromthetechnicaldigestofthefourteenthieeeinternationalworkshoponmicroelectromechanicalsystemsmems20012125january2001interlakenswitzerland AT internationalconferenceonmicroelectromechanicalsystemsinterlaken micromechanicsspecialissueofthemicromechanicssectionofsensorsandactuatorsbasedoncontributionsrevisedfromthetechnicaldigestofthefourteenthieeeinternationalworkshoponmicroelectromechanicalsystemsmems20012125january2001interlakenswitzerland |