Special section on ICMTS '99: [... held in Göteborg, Sweden, on March 16 - 18, 1999]
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Bibliographic Details
Corporate Author: International Conference on Microelectronic Test Structures Göteborg (Author)
Format: Conference Proceeding Book
Language:English
Published: Piscataway, NJ Inst. of Electrical and Electronics Engineers 2000
Subjects:
Item Description:Literaturangaben. - In: IEEE transactions on semiconductor manufacturing ; 13 (2000),2
Physical Description:S. 117 - 254 Ill., graph. Darst.

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