Special section on IWSM '98:
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York, NY
Inst. of Electrical and Electronics Engineers
1999
|
| Schlagworte: | |
| Beschreibung: | Literaturangaben. - In: IEEE transactions on semiconductor manufacturing ; 12 (1999),4 |
| Beschreibung: | S. 385 - 530 Ill., graph. Darst. |
Internformat
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| spelling | International Workshop on Statistical Metrology 3 1998 Honolulu, Hawaii Verfasser (DE-588)5327809-4 aut Special section on IWSM '98 guest ed. C. Guardiani ... New York, NY Inst. of Electrical and Electronics Engineers 1999 S. 385 - 530 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - In: IEEE transactions on semiconductor manufacturing ; 12 (1999),4 Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Statistik (DE-588)4056995-0 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Statistik (DE-588)4056995-0 s DE-604 Halbleitertechnologie (DE-588)4158814-9 s Guardiani, Carlo Sonstige oth |
| spellingShingle | Special section on IWSM '98 Halbleitertechnologie (DE-588)4158814-9 gnd Statistik (DE-588)4056995-0 gnd |
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| title | Special section on IWSM '98 |
| title_auth | Special section on IWSM '98 |
| title_exact_search | Special section on IWSM '98 |
| title_exact_search_txtP | Special section on IWSM '98 |
| title_full | Special section on IWSM '98 guest ed. C. Guardiani ... |
| title_fullStr | Special section on IWSM '98 guest ed. C. Guardiani ... |
| title_full_unstemmed | Special section on IWSM '98 guest ed. C. Guardiani ... |
| title_short | Special section on IWSM '98 |
| title_sort | special section on iwsm 98 |
| topic | Halbleitertechnologie (DE-588)4158814-9 gnd Statistik (DE-588)4056995-0 gnd |
| topic_facet | Halbleitertechnologie Statistik Konferenzschrift |
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