Special section on the eighth annual Advanced Semiconductor Manufacturing Conference and Workshop ( ASMC '97 ):
Saved in:
| Corporate Author: | |
|---|---|
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
New York, NY
Inst. of Electrical and Electronics Engineers
1999
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| Subjects: | |
| Item Description: | Literaturangaben. - In: IEEE transactions on semiconductor manufacturing ; 12 (1999),1 |
| Physical Description: | 147 S. Ill., graph. Darst. |
Staff View
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| spelling | Advanced Semiconductor Manufacturing Conference and Workshop 8 1997 Cambridge, Mass. Verfasser (DE-588)5278673-0 aut Special section on the eighth annual Advanced Semiconductor Manufacturing Conference and Workshop ( ASMC '97 ) guest ed. R. K. Nurani ... New York, NY Inst. of Electrical and Electronics Engineers 1999 147 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - In: IEEE transactions on semiconductor manufacturing ; 12 (1999),1 Fertigung (DE-588)4016899-2 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Fertigung (DE-588)4016899-2 s DE-604 Halbleiter (DE-588)4022993-2 s Nurani, Raman K. Sonstige oth |
| spellingShingle | Special section on the eighth annual Advanced Semiconductor Manufacturing Conference and Workshop ( ASMC '97 ) Fertigung (DE-588)4016899-2 gnd Halbleiter (DE-588)4022993-2 gnd |
| subject_GND | (DE-588)4016899-2 (DE-588)4022993-2 (DE-588)1071861417 |
| title | Special section on the eighth annual Advanced Semiconductor Manufacturing Conference and Workshop ( ASMC '97 ) |
| title_auth | Special section on the eighth annual Advanced Semiconductor Manufacturing Conference and Workshop ( ASMC '97 ) |
| title_exact_search | Special section on the eighth annual Advanced Semiconductor Manufacturing Conference and Workshop ( ASMC '97 ) |
| title_exact_search_txtP | Special section on the eighth annual Advanced Semiconductor Manufacturing Conference and Workshop ( ASMC '97 ) |
| title_full | Special section on the eighth annual Advanced Semiconductor Manufacturing Conference and Workshop ( ASMC '97 ) guest ed. R. K. Nurani ... |
| title_fullStr | Special section on the eighth annual Advanced Semiconductor Manufacturing Conference and Workshop ( ASMC '97 ) guest ed. R. K. Nurani ... |
| title_full_unstemmed | Special section on the eighth annual Advanced Semiconductor Manufacturing Conference and Workshop ( ASMC '97 ) guest ed. R. K. Nurani ... |
| title_short | Special section on the eighth annual Advanced Semiconductor Manufacturing Conference and Workshop ( ASMC '97 ) |
| title_sort | special section on the eighth annual advanced semiconductor manufacturing conference and workshop asmc 97 |
| topic | Fertigung (DE-588)4016899-2 gnd Halbleiter (DE-588)4022993-2 gnd |
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