Special section on the eighth annual Advanced Semiconductor Manufacturing Conference and Workshop ( ASMC '97 ):
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York, NY
Inst. of Electrical and Electronics Engineers
1999
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| Schlagworte: | |
| Beschreibung: | Literaturangaben. - In: IEEE transactions on semiconductor manufacturing ; 12 (1999),1 |
| Beschreibung: | 147 S. Ill., graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV021954768 | ||
| 003 | DE-604 | ||
| 005 | 20040302000000.0 | ||
| 007 | t | ||
| 008 | 000621s1999 ad|| |||| 10||| eng d | ||
| 035 | |a (OCoLC)245779195 | ||
| 035 | |a (DE-599)BVBBV021954768 | ||
| 040 | |a DE-604 |b ger | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-706 | ||
| 111 | 2 | |a Advanced Semiconductor Manufacturing Conference and Workshop |n 8 |d 1997 |c Cambridge, Mass. |j Verfasser |0 (DE-588)5278673-0 |4 aut | |
| 245 | 1 | 0 | |a Special section on the eighth annual Advanced Semiconductor Manufacturing Conference and Workshop ( ASMC '97 ) |c guest ed. R. K. Nurani ... |
| 264 | 1 | |a New York, NY |b Inst. of Electrical and Electronics Engineers |c 1999 | |
| 300 | |a 147 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Literaturangaben. - In: IEEE transactions on semiconductor manufacturing ; 12 (1999),1 | ||
| 650 | 0 | 7 | |a Fertigung |0 (DE-588)4016899-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Fertigung |0 (DE-588)4016899-2 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
| 689 | 1 | |5 DE-604 | |
| 700 | 1 | |a Nurani, Raman K. |e Sonstige |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-015169918 | ||
Datensatz im Suchindex
| _version_ | 1804135920744529920 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| author_corporate | Advanced Semiconductor Manufacturing Conference and Workshop Cambridge, Mass |
| author_corporate_role | aut |
| author_facet | Advanced Semiconductor Manufacturing Conference and Workshop Cambridge, Mass |
| author_sort | Advanced Semiconductor Manufacturing Conference and Workshop Cambridge, Mass |
| building | Verbundindex |
| bvnumber | BV021954768 |
| ctrlnum | (OCoLC)245779195 (DE-599)BVBBV021954768 |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01353nam a2200349zc 4500</leader><controlfield tag="001">BV021954768</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20040302000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">000621s1999 ad|| |||| 10||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)245779195</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV021954768</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-706</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">Advanced Semiconductor Manufacturing Conference and Workshop</subfield><subfield code="n">8</subfield><subfield code="d">1997</subfield><subfield code="c">Cambridge, Mass.</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)5278673-0</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Special section on the eighth annual Advanced Semiconductor Manufacturing Conference and Workshop ( ASMC '97 )</subfield><subfield code="c">guest ed. R. K. Nurani ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York, NY</subfield><subfield code="b">Inst. of Electrical and Electronics Engineers</subfield><subfield code="c">1999</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">147 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Literaturangaben. - In: IEEE transactions on semiconductor manufacturing ; 12 (1999),1</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Fertigung</subfield><subfield code="0">(DE-588)4016899-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Fertigung</subfield><subfield code="0">(DE-588)4016899-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Nurani, Raman K.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-015169918</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV021954768 |
| illustrated | Illustrated |
| index_date | 2024-07-02T16:08:00Z |
| indexdate | 2024-07-09T20:48:10Z |
| institution | BVB |
| institution_GND | (DE-588)5278673-0 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-015169918 |
| oclc_num | 245779195 |
| open_access_boolean | |
| owner | DE-706 |
| owner_facet | DE-706 |
| physical | 147 S. Ill., graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| publisher | Inst. of Electrical and Electronics Engineers |
| record_format | marc |
| spelling | Advanced Semiconductor Manufacturing Conference and Workshop 8 1997 Cambridge, Mass. Verfasser (DE-588)5278673-0 aut Special section on the eighth annual Advanced Semiconductor Manufacturing Conference and Workshop ( ASMC '97 ) guest ed. R. K. Nurani ... New York, NY Inst. of Electrical and Electronics Engineers 1999 147 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben. - In: IEEE transactions on semiconductor manufacturing ; 12 (1999),1 Fertigung (DE-588)4016899-2 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Fertigung (DE-588)4016899-2 s DE-604 Halbleiter (DE-588)4022993-2 s Nurani, Raman K. Sonstige oth |
| spellingShingle | Special section on the eighth annual Advanced Semiconductor Manufacturing Conference and Workshop ( ASMC '97 ) Fertigung (DE-588)4016899-2 gnd Halbleiter (DE-588)4022993-2 gnd |
| subject_GND | (DE-588)4016899-2 (DE-588)4022993-2 (DE-588)1071861417 |
| title | Special section on the eighth annual Advanced Semiconductor Manufacturing Conference and Workshop ( ASMC '97 ) |
| title_auth | Special section on the eighth annual Advanced Semiconductor Manufacturing Conference and Workshop ( ASMC '97 ) |
| title_exact_search | Special section on the eighth annual Advanced Semiconductor Manufacturing Conference and Workshop ( ASMC '97 ) |
| title_exact_search_txtP | Special section on the eighth annual Advanced Semiconductor Manufacturing Conference and Workshop ( ASMC '97 ) |
| title_full | Special section on the eighth annual Advanced Semiconductor Manufacturing Conference and Workshop ( ASMC '97 ) guest ed. R. K. Nurani ... |
| title_fullStr | Special section on the eighth annual Advanced Semiconductor Manufacturing Conference and Workshop ( ASMC '97 ) guest ed. R. K. Nurani ... |
| title_full_unstemmed | Special section on the eighth annual Advanced Semiconductor Manufacturing Conference and Workshop ( ASMC '97 ) guest ed. R. K. Nurani ... |
| title_short | Special section on the eighth annual Advanced Semiconductor Manufacturing Conference and Workshop ( ASMC '97 ) |
| title_sort | special section on the eighth annual advanced semiconductor manufacturing conference and workshop asmc 97 |
| topic | Fertigung (DE-588)4016899-2 gnd Halbleiter (DE-588)4022993-2 gnd |
| topic_facet | Fertigung Halbleiter Konferenzschrift |
| work_keys_str_mv | AT advancedsemiconductormanufacturingconferenceandworkshopcambridgemass specialsectionontheeighthannualadvancedsemiconductormanufacturingconferenceandworkshopasmc97 AT nuraniramank specialsectionontheeighthannualadvancedsemiconductormanufacturingconferenceandworkshopasmc97 |