Optimierung eines DC-Sputtermagnetrons:
Saved in:
| Main Author: | |
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| Format: | Book |
| Language: | German |
| Published: |
1998
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| Subjects: | |
| Item Description: | Kaiserslautern, Univ., Diss., 1997 |
| Physical Description: | 123 S. Ill., graph. Darst. |
Staff View
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Record in the Search Index
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| index_date | 2024-07-02T16:07:13Z |
| indexdate | 2024-07-09T20:47:57Z |
| institution | BVB |
| language | German |
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| physical | 123 S. Ill., graph. Darst. |
| publishDate | 1998 |
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| spelling | Mayer, Ralf Verfasser aut Optimierung eines DC-Sputtermagnetrons Ralf Mayer 1998 123 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Kaiserslautern, Univ., Diss., 1997 Magnetron (DE-588)4037035-5 gnd rswk-swf Beschichten (DE-588)4005996-0 gnd rswk-swf Geräteentwicklung (DE-588)4267986-2 gnd rswk-swf Magnetronsputtern (DE-588)4208514-7 gnd rswk-swf Lauffeldröhre (DE-588)4166908-3 gnd rswk-swf Gasentladungsröhre (DE-588)4156006-1 gnd rswk-swf Argon (DE-588)4142990-4 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Beschichten (DE-588)4005996-0 s DE-604 Argon (DE-588)4142990-4 s Gasentladungsröhre (DE-588)4156006-1 s Lauffeldröhre (DE-588)4166908-3 s Magnetronsputtern (DE-588)4208514-7 s Magnetron (DE-588)4037035-5 s Geräteentwicklung (DE-588)4267986-2 s 1\p DE-604 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Mayer, Ralf Optimierung eines DC-Sputtermagnetrons Magnetron (DE-588)4037035-5 gnd Beschichten (DE-588)4005996-0 gnd Geräteentwicklung (DE-588)4267986-2 gnd Magnetronsputtern (DE-588)4208514-7 gnd Lauffeldröhre (DE-588)4166908-3 gnd Gasentladungsröhre (DE-588)4156006-1 gnd Argon (DE-588)4142990-4 gnd |
| subject_GND | (DE-588)4037035-5 (DE-588)4005996-0 (DE-588)4267986-2 (DE-588)4208514-7 (DE-588)4166908-3 (DE-588)4156006-1 (DE-588)4142990-4 (DE-588)4113937-9 |
| title | Optimierung eines DC-Sputtermagnetrons |
| title_auth | Optimierung eines DC-Sputtermagnetrons |
| title_exact_search | Optimierung eines DC-Sputtermagnetrons |
| title_exact_search_txtP | Optimierung eines DC-Sputtermagnetrons |
| title_full | Optimierung eines DC-Sputtermagnetrons Ralf Mayer |
| title_fullStr | Optimierung eines DC-Sputtermagnetrons Ralf Mayer |
| title_full_unstemmed | Optimierung eines DC-Sputtermagnetrons Ralf Mayer |
| title_short | Optimierung eines DC-Sputtermagnetrons |
| title_sort | optimierung eines dc sputtermagnetrons |
| topic | Magnetron (DE-588)4037035-5 gnd Beschichten (DE-588)4005996-0 gnd Geräteentwicklung (DE-588)4267986-2 gnd Magnetronsputtern (DE-588)4208514-7 gnd Lauffeldröhre (DE-588)4166908-3 gnd Gasentladungsröhre (DE-588)4156006-1 gnd Argon (DE-588)4142990-4 gnd |
| topic_facet | Magnetron Beschichten Geräteentwicklung Magnetronsputtern Lauffeldröhre Gasentladungsröhre Argon Hochschulschrift |
| work_keys_str_mv | AT mayerralf optimierungeinesdcsputtermagnetrons |