Handbook of VLSI microlithography: principles, technology and applications
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Park Ridge, NJ
Noyes
1991
|
| Edition: | 1. print. |
| Subjects: | |
| Physical Description: | XXII, 649 S. |
| ISBN: | 0815512813 |
Staff View
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| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 1. print. |
| format | Book |
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| institution | BVB |
| isbn | 0815512813 |
| language | English |
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| physical | XXII, 649 S. |
| publishDate | 1991 |
| publishDateSearch | 1991 |
| publishDateSort | 1991 |
| publisher | Noyes |
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| spelling | Handbook of VLSI microlithography principles, technology and applications 1. print. Park Ridge, NJ Noyes 1991 XXII, 649 S. txt rdacontent n rdamedia nc rdacarrier Integrated circuits Very large scale integration Microlithography VLSI (DE-588)4117388-0 gnd rswk-swf Elektronenstrahllithografie (DE-588)4151897-4 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd rswk-swf Elektronenstrahllithografie (DE-588)4151897-4 s DE-604 VLSI (DE-588)4117388-0 s Lithografie Halbleitertechnologie (DE-588)4191584-7 s 1\p DE-604 Fotolithografie Halbleitertechnologie (DE-588)4174516-4 s 2\p DE-604 Glendinning, William B. Sonstige oth 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Handbook of VLSI microlithography principles, technology and applications Integrated circuits Very large scale integration Microlithography VLSI (DE-588)4117388-0 gnd Elektronenstrahllithografie (DE-588)4151897-4 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| subject_GND | (DE-588)4117388-0 (DE-588)4151897-4 (DE-588)4191584-7 (DE-588)4174516-4 |
| title | Handbook of VLSI microlithography principles, technology and applications |
| title_auth | Handbook of VLSI microlithography principles, technology and applications |
| title_exact_search | Handbook of VLSI microlithography principles, technology and applications |
| title_exact_search_txtP | Handbook of VLSI microlithography principles, technology and applications |
| title_full | Handbook of VLSI microlithography principles, technology and applications |
| title_fullStr | Handbook of VLSI microlithography principles, technology and applications |
| title_full_unstemmed | Handbook of VLSI microlithography principles, technology and applications |
| title_short | Handbook of VLSI microlithography |
| title_sort | handbook of vlsi microlithography principles technology and applications |
| title_sub | principles, technology and applications |
| topic | Integrated circuits Very large scale integration Microlithography VLSI (DE-588)4117388-0 gnd Elektronenstrahllithografie (DE-588)4151897-4 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| topic_facet | Integrated circuits Very large scale integration Microlithography VLSI Elektronenstrahllithografie Lithografie Halbleitertechnologie Fotolithografie Halbleitertechnologie |
| work_keys_str_mv | AT glendinningwilliamb handbookofvlsimicrolithographyprinciplestechnologyandapplications |