APA (7th ed.) Citation

(1991). Handbook of VLSI microlithography: Principles, technology and applications (1. print.). Noyes.

Chicago Style (17th ed.) Citation

Handbook of VLSI Microlithography: Principles, Technology and Applications. 1. print. Park Ridge, NJ: Noyes, 1991.

MLA (9th ed.) Citation

Handbook of VLSI Microlithography: Principles, Technology and Applications. 1. print. Noyes, 1991.

Warning: These citations may not always be 100% accurate.