Photon, beam and plasma assisted processing: proceedings of Symposium B on Photon, Beam and Plasma Assisted Processing Fundamentals and Device Technology of the 1988 OE-MRS spring conference ; Strasbourg, France, 31 May - 2 June 1988
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Bibliographic Details
Format: Conference Proceeding Book
Language:Undetermined
Published: Amsterdam North-Holland 1989
Subjects:
Item Description:In: Applied surface science. Vol.36, 1989
Physical Description:XV, 703 S. Ill., graph. Darst.

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