(1989). Photon, beam and plasma assisted processing: Proceedings of Symposium B on Photon, Beam and Plasma Assisted Processing Fundamentals and Device Technology of the 1988 OE-MRS spring conference ; Strasbourg, France, 31 May - 2 June 1988. North-Holland.
Chicago-Zitierstil (17. Ausg.)Photon, Beam and Plasma Assisted Processing: Proceedings of Symposium B on Photon, Beam and Plasma Assisted Processing Fundamentals and Device Technology of the 1988 OE-MRS Spring Conference ; Strasbourg, France, 31 May - 2 June 1988. Amsterdam: North-Holland, 1989.
MLA-Zitierstil (9. Ausg.)Photon, Beam and Plasma Assisted Processing: Proceedings of Symposium B on Photon, Beam and Plasma Assisted Processing Fundamentals and Device Technology of the 1988 OE-MRS Spring Conference ; Strasbourg, France, 31 May - 2 June 1988. North-Holland, 1989.