Proceedings of the Japan-US Seminar on Focused Ion Beam Technology and Applications: 15-19 November 1987, Senri Hankyu Hotel, Osaka and 20 November 1987, Shima Kanko Hotel, Mie Prefect, Japan
Saved in:
| Corporate Author: | |
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| Format: | Conference Proceeding Book |
| Language: | Undetermined |
| Published: |
New York
American Inst. of Physics
1988
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| Subjects: | |
| Item Description: | In: Journal of vacuum science & technology / 2/B. Vol.6, Nr.3, 1988 |
| Physical Description: | S. 817-1054 Ill., graph. Darst. |
Staff View
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| index_date | 2024-07-02T16:03:59Z |
| indexdate | 2024-07-09T20:46:42Z |
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| physical | S. 817-1054 Ill., graph. Darst. |
| publishDate | 1988 |
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| publisher | American Inst. of Physics |
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| spelling | Japan US Seminar on Focused Ion Beam Technology and Applications 1987 Osaka Verfasser (DE-588)16143415-0 aut Proceedings of the Japan-US Seminar on Focused Ion Beam Technology and Applications 15-19 November 1987, Senri Hankyu Hotel, Osaka and 20 November 1987, Shima Kanko Hotel, Mie Prefect, Japan New York American Inst. of Physics 1988 S. 817-1054 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier In: Journal of vacuum science & technology / 2/B. Vol.6, Nr.3, 1988 Teilchenstrahl (DE-588)4165339-7 gnd rswk-swf Ionenstrahl (DE-588)4162347-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Ionenstrahl (DE-588)4162347-2 s DE-604 Teilchenstrahl (DE-588)4165339-7 s Harriott, Lloyd R. Sonstige oth |
| spellingShingle | Proceedings of the Japan-US Seminar on Focused Ion Beam Technology and Applications 15-19 November 1987, Senri Hankyu Hotel, Osaka and 20 November 1987, Shima Kanko Hotel, Mie Prefect, Japan Teilchenstrahl (DE-588)4165339-7 gnd Ionenstrahl (DE-588)4162347-2 gnd |
| subject_GND | (DE-588)4165339-7 (DE-588)4162347-2 (DE-588)1071861417 |
| title | Proceedings of the Japan-US Seminar on Focused Ion Beam Technology and Applications 15-19 November 1987, Senri Hankyu Hotel, Osaka and 20 November 1987, Shima Kanko Hotel, Mie Prefect, Japan |
| title_auth | Proceedings of the Japan-US Seminar on Focused Ion Beam Technology and Applications 15-19 November 1987, Senri Hankyu Hotel, Osaka and 20 November 1987, Shima Kanko Hotel, Mie Prefect, Japan |
| title_exact_search | Proceedings of the Japan-US Seminar on Focused Ion Beam Technology and Applications 15-19 November 1987, Senri Hankyu Hotel, Osaka and 20 November 1987, Shima Kanko Hotel, Mie Prefect, Japan |
| title_exact_search_txtP | Proceedings of the Japan-US Seminar on Focused Ion Beam Technology and Applications 15-19 November 1987, Senri Hankyu Hotel, Osaka and 20 November 1987, Shima Kanko Hotel, Mie Prefect, Japan |
| title_full | Proceedings of the Japan-US Seminar on Focused Ion Beam Technology and Applications 15-19 November 1987, Senri Hankyu Hotel, Osaka and 20 November 1987, Shima Kanko Hotel, Mie Prefect, Japan |
| title_fullStr | Proceedings of the Japan-US Seminar on Focused Ion Beam Technology and Applications 15-19 November 1987, Senri Hankyu Hotel, Osaka and 20 November 1987, Shima Kanko Hotel, Mie Prefect, Japan |
| title_full_unstemmed | Proceedings of the Japan-US Seminar on Focused Ion Beam Technology and Applications 15-19 November 1987, Senri Hankyu Hotel, Osaka and 20 November 1987, Shima Kanko Hotel, Mie Prefect, Japan |
| title_short | Proceedings of the Japan-US Seminar on Focused Ion Beam Technology and Applications |
| title_sort | proceedings of the japan us seminar on focused ion beam technology and applications 15 19 november 1987 senri hankyu hotel osaka and 20 november 1987 shima kanko hotel mie prefect japan |
| title_sub | 15-19 November 1987, Senri Hankyu Hotel, Osaka and 20 November 1987, Shima Kanko Hotel, Mie Prefect, Japan |
| topic | Teilchenstrahl (DE-588)4165339-7 gnd Ionenstrahl (DE-588)4162347-2 gnd |
| topic_facet | Teilchenstrahl Ionenstrahl Konferenzschrift |
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