Proceedings of the Japan-US Seminar on Focused Ion Beam Technology and Applications 15-19 November 1987, Senri Hankyu Hotel, Osaka and 20 November 1987, Shima Kanko Hotel, Mie Prefect, Japan (American Inst. of Physics, 1988)
In: Journal of vacuum science & technology / 2/B. Vol.6, Nr.3, 1988