Tables of ion implantation spatial distributions:
Saved in:
Bibliographic Details
Format: Book
Language:English
Russian
Published: New York [u.a.] Gordon and Breach 1986
Edition:Engl.ed., rev.and enl.
Subjects:
Item Description:Einheitssacht.: Tablicy parametrov prostranstvennogo raspredelenija ionno-implantirovannych primesej <engl.>
Physical Description:VIII, 462 S.
ISBN:2881240712

There is no print copy available.

Interlibrary loan Place Request Caution: Not in THWS collection!