International Plasma-Based Ion Implantation Workshop. Papers from the ... International Plasma-Based Ion Implantation Workshop. American Inst. of Physics.
Chicago Style (17th ed.) CitationInternational Plasma-Based Ion Implantation Workshop. Papers from the ... International Plasma-Based Ion Implantation Workshop. New York: American Inst. of Physics.
MLA (9th ed.) CitationInternational Plasma-Based Ion Implantation Workshop. Papers from the ... International Plasma-Based Ion Implantation Workshop. American Inst. of Physics.
Warning: These citations may not always be 100% accurate.