Ion implantation in semiconductors: science and technology ; proceedings of the ... Internat. Conference on Ion Implantation in Semiconductors and Other Materials ...
Gespeichert in:
| Format: | Tagungsbericht Buch |
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| Sprache: | Undetermined |
| Veröffentlicht: |
Plenum Pr.
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| Schlagworte: |
Internformat
MARC
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Datensatz im Suchindex
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| spelling | Ion implantation in semiconductors science and technology ; proceedings of the ... Internat. Conference on Ion Implantation in Semiconductors and Other Materials ... Plenum Pr. txt rdacontent n rdamedia nc rdacarrier Ionenimplantation (DE-588)4027606-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Ionenimplantation (DE-588)4027606-5 s DE-604 Namba, Susumu Sonstige oth International Conference on Ion Implantation in Semiconductors and Other Materials Sonstige (DE-588)60325-9 oth |
| spellingShingle | Ion implantation in semiconductors science and technology ; proceedings of the ... Internat. Conference on Ion Implantation in Semiconductors and Other Materials ... Ionenimplantation (DE-588)4027606-5 gnd |
| subject_GND | (DE-588)4027606-5 (DE-588)1071861417 |
| title | Ion implantation in semiconductors science and technology ; proceedings of the ... Internat. Conference on Ion Implantation in Semiconductors and Other Materials ... |
| title_auth | Ion implantation in semiconductors science and technology ; proceedings of the ... Internat. Conference on Ion Implantation in Semiconductors and Other Materials ... |
| title_exact_search | Ion implantation in semiconductors science and technology ; proceedings of the ... Internat. Conference on Ion Implantation in Semiconductors and Other Materials ... |
| title_exact_search_txtP | Ion implantation in semiconductors science and technology ; proceedings of the ... Internat. Conference on Ion Implantation in Semiconductors and Other Materials ... |
| title_full | Ion implantation in semiconductors science and technology ; proceedings of the ... Internat. Conference on Ion Implantation in Semiconductors and Other Materials ... |
| title_fullStr | Ion implantation in semiconductors science and technology ; proceedings of the ... Internat. Conference on Ion Implantation in Semiconductors and Other Materials ... |
| title_full_unstemmed | Ion implantation in semiconductors science and technology ; proceedings of the ... Internat. Conference on Ion Implantation in Semiconductors and Other Materials ... |
| title_short | Ion implantation in semiconductors |
| title_sort | ion implantation in semiconductors science and technology proceedings of the internat conference on ion implantation in semiconductors and other materials |
| title_sub | science and technology ; proceedings of the ... Internat. Conference on Ion Implantation in Semiconductors and Other Materials ... |
| topic | Ionenimplantation (DE-588)4027606-5 gnd |
| topic_facet | Ionenimplantation Konferenzschrift |
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