Run-to-run control in semiconductor manufacturing:
Saved in:
| Format: | Electronic eBook |
|---|---|
| Language: | English |
| Published: |
Boca Raton
CRC Press
2001
|
| Subjects: | |
| Online Access: | Publisher description |
| Physical Description: | 1 Online-Ressource |
Staff View
MARC
| LEADER | 00000nmm a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV021769570 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 061016s2001 xxu|||| o||u| ||||||eng d | ||
| 010 | |a 00059910 | ||
| 035 | |a (OCoLC)156898399 | ||
| 035 | |a (DE-599)BVBBV021769570 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 044 | |a xxu |c US | ||
| 050 | 0 | |a TK7871.85 | |
| 082 | 0 | |a 621.3815/2 | |
| 084 | |a ZN 4100 |0 (DE-625)157351: |2 rvk | ||
| 245 | 1 | 0 | |a Run-to-run control in semiconductor manufacturing |c edited by James Moyne ... |
| 264 | 1 | |a Boca Raton |b CRC Press |c 2001 | |
| 300 | |a 1 Online-Ressource | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 650 | 4 | |a Semiconductors |x Design and construction | |
| 650 | 4 | |a Semiconductor industry |x Production control | |
| 650 | 4 | |a Electronic packaging | |
| 650 | 4 | |a Production management | |
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Fertigung |0 (DE-588)4016899-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Regelungstechnik |0 (DE-588)4076594-5 |2 gnd |9 rswk-swf |
| 655 | 4 | |a Electronic books | |
| 689 | 0 | 0 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
| 689 | 0 | 1 | |a Fertigung |0 (DE-588)4016899-2 |D s |
| 689 | 0 | 2 | |a Regelungstechnik |0 (DE-588)4076594-5 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Moyne, James |e Sonstige |4 oth | |
| 856 | 4 | |u http://www.loc.gov/catdir/enhancements/fy0646/00059910-d.html |3 Publisher description | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-014982514 | ||
Record in the Search Index
| _version_ | 1804135636392738816 |
|---|---|
| adam_txt | |
| any_adam_object | |
| any_adam_object_boolean | |
| building | Verbundindex |
| bvnumber | BV021769570 |
| callnumber-first | T - Technology |
| callnumber-label | TK7871 |
| callnumber-raw | TK7871.85 |
| callnumber-search | TK7871.85 |
| callnumber-sort | TK 47871.85 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 4100 |
| ctrlnum | (OCoLC)156898399 (DE-599)BVBBV021769570 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01499nmm a2200445zc 4500</leader><controlfield tag="001">BV021769570</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">061016s2001 xxu|||| o||u| ||||||eng d</controlfield><datafield tag="010" ind1=" " ind2=" "><subfield code="a">00059910</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)156898399</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV021769570</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">xxu</subfield><subfield code="c">US</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7871.85</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815/2</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4100</subfield><subfield code="0">(DE-625)157351:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Run-to-run control in semiconductor manufacturing</subfield><subfield code="c">edited by James Moyne ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Boca Raton</subfield><subfield code="b">CRC Press</subfield><subfield code="c">2001</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield><subfield code="x">Design and construction</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductor industry</subfield><subfield code="x">Production control</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electronic packaging</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Production management</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Fertigung</subfield><subfield code="0">(DE-588)4016899-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Regelungstechnik</subfield><subfield code="0">(DE-588)4076594-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="4"><subfield code="a">Electronic books</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Fertigung</subfield><subfield code="0">(DE-588)4016899-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Regelungstechnik</subfield><subfield code="0">(DE-588)4076594-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Moyne, James</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="856" ind1="4" ind2=" "><subfield code="u">http://www.loc.gov/catdir/enhancements/fy0646/00059910-d.html</subfield><subfield code="3">Publisher description</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-014982514</subfield></datafield></record></collection> |
| genre | Electronic books |
| genre_facet | Electronic books |
| id | DE-604.BV021769570 |
| illustrated | Not Illustrated |
| index_date | 2024-07-02T15:37:55Z |
| indexdate | 2024-07-09T20:43:39Z |
| institution | BVB |
| language | English |
| lccn | 00059910 |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-014982514 |
| oclc_num | 156898399 |
| open_access_boolean | |
| physical | 1 Online-Ressource |
| publishDate | 2001 |
| publishDateSearch | 2001 |
| publishDateSort | 2001 |
| publisher | CRC Press |
| record_format | marc |
| spelling | Run-to-run control in semiconductor manufacturing edited by James Moyne ... Boca Raton CRC Press 2001 1 Online-Ressource txt rdacontent c rdamedia cr rdacarrier Semiconductors Design and construction Semiconductor industry Production control Electronic packaging Production management Halbleiter (DE-588)4022993-2 gnd rswk-swf Fertigung (DE-588)4016899-2 gnd rswk-swf Regelungstechnik (DE-588)4076594-5 gnd rswk-swf Electronic books Halbleiter (DE-588)4022993-2 s Fertigung (DE-588)4016899-2 s Regelungstechnik (DE-588)4076594-5 s DE-604 Moyne, James Sonstige oth http://www.loc.gov/catdir/enhancements/fy0646/00059910-d.html Publisher description |
| spellingShingle | Run-to-run control in semiconductor manufacturing Semiconductors Design and construction Semiconductor industry Production control Electronic packaging Production management Halbleiter (DE-588)4022993-2 gnd Fertigung (DE-588)4016899-2 gnd Regelungstechnik (DE-588)4076594-5 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4016899-2 (DE-588)4076594-5 |
| title | Run-to-run control in semiconductor manufacturing |
| title_auth | Run-to-run control in semiconductor manufacturing |
| title_exact_search | Run-to-run control in semiconductor manufacturing |
| title_exact_search_txtP | Run-to-run control in semiconductor manufacturing |
| title_full | Run-to-run control in semiconductor manufacturing edited by James Moyne ... |
| title_fullStr | Run-to-run control in semiconductor manufacturing edited by James Moyne ... |
| title_full_unstemmed | Run-to-run control in semiconductor manufacturing edited by James Moyne ... |
| title_short | Run-to-run control in semiconductor manufacturing |
| title_sort | run to run control in semiconductor manufacturing |
| topic | Semiconductors Design and construction Semiconductor industry Production control Electronic packaging Production management Halbleiter (DE-588)4022993-2 gnd Fertigung (DE-588)4016899-2 gnd Regelungstechnik (DE-588)4076594-5 gnd |
| topic_facet | Semiconductors Design and construction Semiconductor industry Production control Electronic packaging Production management Halbleiter Fertigung Regelungstechnik Electronic books |
| url | http://www.loc.gov/catdir/enhancements/fy0646/00059910-d.html |
| work_keys_str_mv | AT moynejames runtoruncontrolinsemiconductormanufacturing |