Nano- and microelectromechanical systems: fundamentals of nano- and microengineering
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Bibliographic Details
Format: Electronic eBook
Language:English
Published: Boca Raton [u.a.] CRC Press 2001
Series:Nano- and microscience, engineering, technology and medicine series
Subjects:
Physical Description:1 Online-Ressource

There is no print copy available.

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