APA (7th ed.) Citation

Levinson, H. J. (2005). Principles of lithography (2. ed.). SPIE Press.

Chicago Style (17th ed.) Citation

Levinson, Harry J. Principles of Lithography. 2. ed. Bellingham, WA: SPIE Press, 2005.

MLA (9th ed.) Citation

Levinson, Harry J. Principles of Lithography. 2. ed. SPIE Press, 2005.