MOEMS: micro-opto-electro-mechanical systems
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Bellingham, Wash.
SPIE Press
2005
|
| Subjects: | |
| Online Access: | Table of contents |
| Item Description: | Includes bibliographical references and index |
| Physical Description: | XXI614 S. Ill. 26 cm |
| ISBN: | 0819450219 |
Staff View
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| 245 | 1 | 0 | |a MOEMS |b micro-opto-electro-mechanical systems |c Manouchehr E. Motamedi, editor |
| 264 | 1 | |a Bellingham, Wash. |b SPIE Press |c 2005 | |
| 300 | |a XXI614 S. |b Ill. |c 26 cm | ||
| 336 | |b txt |2 rdacontent | ||
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| 500 | |a Includes bibliographical references and index | ||
| 650 | 4 | |a Microelectromechanical systems | |
| 650 | 4 | |a Optoelectronic devices | |
| 650 | 4 | |a Microfabrication | |
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Record in the Search Index
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| bvnumber | BV021662306 |
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| callnumber-subject | TK - Electrical and Nuclear Engineering |
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| classification_tum | TEC 025f ELT 330f |
| ctrlnum | (OCoLC)56799174 (DE-599)BVBBV021662306 |
| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Technik Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| discipline_str_mv | Technik Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV021662306 |
| illustrated | Illustrated |
| index_date | 2024-07-02T15:06:23Z |
| indexdate | 2024-07-09T20:41:04Z |
| institution | BVB |
| isbn | 0819450219 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-014876795 |
| oclc_num | 56799174 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-83 |
| owner_facet | DE-91 DE-BY-TUM DE-83 |
| physical | XXI614 S. Ill. 26 cm |
| publishDate | 2005 |
| publishDateSearch | 2005 |
| publishDateSort | 2005 |
| publisher | SPIE Press |
| record_format | marc |
| spelling | MOEMS micro-opto-electro-mechanical systems Manouchehr E. Motamedi, editor Bellingham, Wash. SPIE Press 2005 XXI614 S. Ill. 26 cm txt rdacontent n rdamedia nc rdacarrier Includes bibliographical references and index Microelectromechanical systems Optoelectronic devices Microfabrication Optoelektronisches Bauelement (DE-588)4043689-5 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf MEMS (DE-588)4824724-8 s Optoelektronisches Bauelement (DE-588)4043689-5 s DE-604 Mikromechanik (DE-588)4205811-9 s Mikroelektronik (DE-588)4039207-7 s 1\p DE-604 Motamedi, Manouchehr E. Sonstige oth http://www.loc.gov/catdir/toc/ecip052/2004024395.html Table of contents 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | MOEMS micro-opto-electro-mechanical systems Microelectromechanical systems Optoelectronic devices Microfabrication Optoelektronisches Bauelement (DE-588)4043689-5 gnd Mikroelektronik (DE-588)4039207-7 gnd MEMS (DE-588)4824724-8 gnd Mikromechanik (DE-588)4205811-9 gnd |
| subject_GND | (DE-588)4043689-5 (DE-588)4039207-7 (DE-588)4824724-8 (DE-588)4205811-9 |
| title | MOEMS micro-opto-electro-mechanical systems |
| title_auth | MOEMS micro-opto-electro-mechanical systems |
| title_exact_search | MOEMS micro-opto-electro-mechanical systems |
| title_exact_search_txtP | MOEMS micro-opto-electro-mechanical systems |
| title_full | MOEMS micro-opto-electro-mechanical systems Manouchehr E. Motamedi, editor |
| title_fullStr | MOEMS micro-opto-electro-mechanical systems Manouchehr E. Motamedi, editor |
| title_full_unstemmed | MOEMS micro-opto-electro-mechanical systems Manouchehr E. Motamedi, editor |
| title_short | MOEMS |
| title_sort | moems micro opto electro mechanical systems |
| title_sub | micro-opto-electro-mechanical systems |
| topic | Microelectromechanical systems Optoelectronic devices Microfabrication Optoelektronisches Bauelement (DE-588)4043689-5 gnd Mikroelektronik (DE-588)4039207-7 gnd MEMS (DE-588)4824724-8 gnd Mikromechanik (DE-588)4205811-9 gnd |
| topic_facet | Microelectromechanical systems Optoelectronic devices Microfabrication Optoelektronisches Bauelement Mikroelektronik MEMS Mikromechanik |
| url | http://www.loc.gov/catdir/toc/ecip052/2004024395.html |
| work_keys_str_mv | AT motamedimanouchehre moemsmicrooptoelectromechanicalsystems |