(2005). MOEMS: Micro-opto-electro-mechanical systems. SPIE Press.
Chicago Style (17th ed.) CitationMOEMS: Micro-opto-electro-mechanical Systems. Bellingham, Wash: SPIE Press, 2005.
MLA (9th ed.) CitationMOEMS: Micro-opto-electro-mechanical Systems. SPIE Press, 2005.
Warning: These citations may not always be 100% accurate.