MEMS: a practical guide to design, analysis, and applications
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Norwich, NY
William Andrew [u.a.]
2006
|
| Subjects: | |
| Physical Description: | XXV, 965 S. Ill., graph. Darst. |
| ISBN: | 0815514972 3540211179 |
Staff View
MARC
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| id | DE-604.BV021550112 |
| illustrated | Illustrated |
| index_date | 2024-07-02T14:31:15Z |
| indexdate | 2024-07-09T20:38:24Z |
| institution | BVB |
| isbn | 0815514972 3540211179 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-014766195 |
| oclc_num | 61362695 |
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| physical | XXV, 965 S. Ill., graph. Darst. |
| publishDate | 2006 |
| publishDateSearch | 2006 |
| publishDateSort | 2006 |
| publisher | William Andrew [u.a.] |
| record_format | marc |
| spelling | MEMS a practical guide to design, analysis, and applications ed. by Jan G. Korvink and Oliver Paul Micro-electro-mechanical systems Norwich, NY William Andrew [u.a.] 2006 XXV, 965 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Microelectromechanical systems MEMS (DE-588)4824724-8 gnd rswk-swf MEMS (DE-588)4824724-8 s DE-604 Korvink, Jan G. Sonstige oth Paul, Oliver Sonstige oth |
| spellingShingle | MEMS a practical guide to design, analysis, and applications Microelectromechanical systems MEMS (DE-588)4824724-8 gnd |
| subject_GND | (DE-588)4824724-8 |
| title | MEMS a practical guide to design, analysis, and applications |
| title_alt | Micro-electro-mechanical systems |
| title_auth | MEMS a practical guide to design, analysis, and applications |
| title_exact_search | MEMS a practical guide to design, analysis, and applications |
| title_exact_search_txtP | MEMS a practical guide to design, analysis, and applications |
| title_full | MEMS a practical guide to design, analysis, and applications ed. by Jan G. Korvink and Oliver Paul |
| title_fullStr | MEMS a practical guide to design, analysis, and applications ed. by Jan G. Korvink and Oliver Paul |
| title_full_unstemmed | MEMS a practical guide to design, analysis, and applications ed. by Jan G. Korvink and Oliver Paul |
| title_short | MEMS |
| title_sort | mems a practical guide to design analysis and applications |
| title_sub | a practical guide to design, analysis, and applications |
| topic | Microelectromechanical systems MEMS (DE-588)4824724-8 gnd |
| topic_facet | Microelectromechanical systems MEMS |
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