Diagnostics and modeling of an inductively coupled radio frequency discharge in hydrogen:
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Bibliographic Details
Main Author: Kadetov, Victor A. 1972- (Author)
Format: Book
Language:English
German
Published: München Verl. Dr. Hut 2005
Edition:1. Aufl.
Series:Physik
Subjects:
Item Description:Zugl.: Bochum, Univ., Diss., 2004
Physical Description:160 S. graph. Darst.
ISBN:3899631706

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