Papers from the 6th AVS International Conference on Microelectronics and Interfaces: 21 - 23 March 2005, Santa Clara, California
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York
American Inst. of Physics
2005
|
| Schriftenreihe: | Journal of vacuum science & technology : B
23,5 |
| Schlagworte: | |
| Beschreibung: | Einzelaufnahme eines Zeitschr.-Heftes |
| Beschreibung: | S. 2179 - 2253 Ill., graph. Darst. |
Internformat
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| 111 | 2 | |a International Conference on Microelectronics and Interfaces |n 6 |d 2005 |c Santa Clara, Calif. |j Verfasser |0 (DE-588)10129150-4 |4 aut | |
| 245 | 1 | 0 | |a Papers from the 6th AVS International Conference on Microelectronics and Interfaces |b 21 - 23 March 2005, Santa Clara, California |c ed. for the proceedings: B. R. Rogers |
| 264 | 1 | |a New York |b American Inst. of Physics |c 2005 | |
| 300 | |a S. 2179 - 2253 |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Journal of vacuum science & technology : B |v 23,5 | |
| 500 | |a Einzelaufnahme eines Zeitschr.-Heftes | ||
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| 650 | 0 | 7 | |a Mikroelektronik |0 (DE-588)4039207-7 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 2005 |z Santa Clara Calif. |2 gnd-content | |
| 655 | 4 | |a Kongress - Santa Clara <Calif., 2005> - Grenzschicht - Mikroelektronik | |
| 689 | 0 | 0 | |a Mikroelektronik |0 (DE-588)4039207-7 |D s |
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| 700 | 1 | |a Rogers, Bridget R. |e Sonstige |4 oth | |
| 710 | 2 | |a American Vacuum Society |e Sonstige |0 (DE-588)867-9 |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-014192360 | ||
Datensatz im Suchindex
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| genre_facet | Konferenzschrift 2005 Santa Clara Calif. Kongress - Santa Clara <Calif., 2005> - Grenzschicht - Mikroelektronik |
| id | DE-604.BV020870612 |
| illustrated | Illustrated |
| index_date | 2024-07-02T13:25:57Z |
| indexdate | 2024-07-09T20:27:08Z |
| institution | BVB |
| institution_GND | (DE-588)10129150-4 (DE-588)867-9 |
| language | English |
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| physical | S. 2179 - 2253 Ill., graph. Darst. |
| publishDate | 2005 |
| publishDateSearch | 2005 |
| publishDateSort | 2005 |
| publisher | American Inst. of Physics |
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| series2 | Journal of vacuum science & technology : B |
| spelling | International Conference on Microelectronics and Interfaces 6 2005 Santa Clara, Calif. Verfasser (DE-588)10129150-4 aut Papers from the 6th AVS International Conference on Microelectronics and Interfaces 21 - 23 March 2005, Santa Clara, California ed. for the proceedings: B. R. Rogers New York American Inst. of Physics 2005 S. 2179 - 2253 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology : B 23,5 Einzelaufnahme eines Zeitschr.-Heftes Grenzschicht (DE-588)4022005-9 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2005 Santa Clara Calif. gnd-content Kongress - Santa Clara <Calif., 2005> - Grenzschicht - Mikroelektronik Mikroelektronik (DE-588)4039207-7 s Grenzschicht (DE-588)4022005-9 s DE-604 Rogers, Bridget R. Sonstige oth American Vacuum Society Sonstige (DE-588)867-9 oth |
| spellingShingle | Papers from the 6th AVS International Conference on Microelectronics and Interfaces 21 - 23 March 2005, Santa Clara, California Grenzschicht (DE-588)4022005-9 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| subject_GND | (DE-588)4022005-9 (DE-588)4039207-7 (DE-588)1071861417 |
| title | Papers from the 6th AVS International Conference on Microelectronics and Interfaces 21 - 23 March 2005, Santa Clara, California |
| title_auth | Papers from the 6th AVS International Conference on Microelectronics and Interfaces 21 - 23 March 2005, Santa Clara, California |
| title_exact_search | Papers from the 6th AVS International Conference on Microelectronics and Interfaces 21 - 23 March 2005, Santa Clara, California |
| title_exact_search_txtP | Papers from the 6th AVS International Conference on Microelectronics and Interfaces 21 - 23 March 2005, Santa Clara, California |
| title_full | Papers from the 6th AVS International Conference on Microelectronics and Interfaces 21 - 23 March 2005, Santa Clara, California ed. for the proceedings: B. R. Rogers |
| title_fullStr | Papers from the 6th AVS International Conference on Microelectronics and Interfaces 21 - 23 March 2005, Santa Clara, California ed. for the proceedings: B. R. Rogers |
| title_full_unstemmed | Papers from the 6th AVS International Conference on Microelectronics and Interfaces 21 - 23 March 2005, Santa Clara, California ed. for the proceedings: B. R. Rogers |
| title_short | Papers from the 6th AVS International Conference on Microelectronics and Interfaces |
| title_sort | papers from the 6th avs international conference on microelectronics and interfaces 21 23 march 2005 santa clara california |
| title_sub | 21 - 23 March 2005, Santa Clara, California |
| topic | Grenzschicht (DE-588)4022005-9 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| topic_facet | Grenzschicht Mikroelektronik Konferenzschrift 2005 Santa Clara Calif. Kongress - Santa Clara <Calif., 2005> - Grenzschicht - Mikroelektronik |
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