Papers from the 16th International Vacuum Microelectronics Conference: 7 - 11 July 2003, Osaka, Japan
Saved in:
| Corporate Author: | |
|---|---|
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
New York
American Inst. of Pysics
2004
|
| Series: | Journal of vacuum science & technology : B
22,3 |
| Subjects: | |
| Item Description: | Einzelaufnahme eines Zeitschr.-Heftes |
| Physical Description: | S. 1217 - 1419 Ill., graph. Darst. |
Staff View
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| illustrated | Illustrated |
| index_date | 2024-07-02T13:17:48Z |
| indexdate | 2024-07-09T20:26:27Z |
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| physical | S. 1217 - 1419 Ill., graph. Darst. |
| publishDate | 2004 |
| publishDateSearch | 2004 |
| publishDateSort | 2004 |
| publisher | American Inst. of Pysics |
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| series2 | Journal of vacuum science & technology : B |
| spelling | International Vacuum Microelectronics Conference 16 2003 Osaka Verfasser (DE-588)5562391-8 aut Papers from the 16th International Vacuum Microelectronics Conference 7 - 11 July 2003, Osaka, Japan ed. for the conf.: Yasuhiko Gotoh ... New York American Inst. of Pysics 2004 S. 1217 - 1419 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology : B 22,3 Einzelaufnahme eines Zeitschr.-Heftes Vakuumelektronik (DE-588)4214651-3 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2003 Osaka gnd-content Kongress - Ottawa <2003> - Halbleiter Vakuumelektronik (DE-588)4214651-3 s DE-604 Gotoh, Yasuhiko Sonstige oth |
| spellingShingle | Papers from the 16th International Vacuum Microelectronics Conference 7 - 11 July 2003, Osaka, Japan Vakuumelektronik (DE-588)4214651-3 gnd |
| subject_GND | (DE-588)4214651-3 (DE-588)1071861417 |
| title | Papers from the 16th International Vacuum Microelectronics Conference 7 - 11 July 2003, Osaka, Japan |
| title_auth | Papers from the 16th International Vacuum Microelectronics Conference 7 - 11 July 2003, Osaka, Japan |
| title_exact_search | Papers from the 16th International Vacuum Microelectronics Conference 7 - 11 July 2003, Osaka, Japan |
| title_exact_search_txtP | Papers from the 16th International Vacuum Microelectronics Conference 7 - 11 July 2003, Osaka, Japan |
| title_full | Papers from the 16th International Vacuum Microelectronics Conference 7 - 11 July 2003, Osaka, Japan ed. for the conf.: Yasuhiko Gotoh ... |
| title_fullStr | Papers from the 16th International Vacuum Microelectronics Conference 7 - 11 July 2003, Osaka, Japan ed. for the conf.: Yasuhiko Gotoh ... |
| title_full_unstemmed | Papers from the 16th International Vacuum Microelectronics Conference 7 - 11 July 2003, Osaka, Japan ed. for the conf.: Yasuhiko Gotoh ... |
| title_short | Papers from the 16th International Vacuum Microelectronics Conference |
| title_sort | papers from the 16th international vacuum microelectronics conference 7 11 july 2003 osaka japan |
| title_sub | 7 - 11 July 2003, Osaka, Japan |
| topic | Vakuumelektronik (DE-588)4214651-3 gnd |
| topic_facet | Vakuumelektronik Konferenzschrift 2003 Osaka Kongress - Ottawa <2003> - Halbleiter |
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