Handbook of photomask manufacturing technology:
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Bibliographic Details
Format: Book
Language:English
Published: Boca Raton [Fla.] Taylor & Francis 2005
Subjects:
Item Description:Includes bibliographical references and index
Physical Description:XXIII, 704 S. Ill. 26 cm
ISBN:0824753747

There is no print copy available.

Interlibrary loan Place Request Caution: Not in THWS collection!