Nano- and microelectromechanical systems: fundamentals of nano- and microengineering
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Boca Raton [u.a.]
CRC Press
2005
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| Edition: | 2. ed. |
| Series: | Nano- and microscience, engineering, technology, and medicine series
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| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | 722 S. Ill., graph. Darst. |
| ISBN: | 0849328381 |
Staff View
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| 245 | 1 | 0 | |a Nano- and microelectromechanical systems |b fundamentals of nano- and microengineering |c Sergey Edward Lyshevski |
| 250 | |a 2. ed. | ||
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Record in the Search Index
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| adam_text | TABLE OF CONTENTS 1 NANO- AND MICROSCIENCE, ENGINEERING, AND TECHNOLOGY
1.1 INTRODUCTION AND OVERVIEW: FROM MICRO- TO NANOSCALE AND BEYOND TO
STRINGOSCALE 1 1.2 INTRODUCTORY DEFINITIONS 4 1.3 CURRENT DEVELOPMENTS
AND THE NEED FOR COHERENT REVOLUTIONARY DEVELOPMENTS 6 1.4 SOCIETAL
CHALLENGES AND IMPLICATIONS 10 1.4.1 MICROSYSTEMS AND MICROTECHNOLOGY 10
1.4.2 NANOSYSTEMS AND NANOTECHNOLOGY 10 1.4.3 NANOENGINEERING AND
NANOSCIENCE 11 1.5 CONCLUSIONS 15 HOMEWORK PROBLEMS 16 REFERENCES 16 2
NANO- AND MICROSCALE SYSTEMS, DEVICES, AND STRUCTURES 2.1 SIZING
FEATURES: FROM MICRO- TO NANOSCALE, AND FROM NANO- TO STRINGOSCALE 19
2.1.1 MENDELEYEV S PERIODIC TABLE OF ELEMENTS AND ELECTRONIC
CONFIGURATIONS 19 2.1.2 NANOENGINEERING AND NANOSCIENCE 24 2.1.3 SMALLER
THAN NANO-, PICO-, AND FEMTOSCALE*REALITY OR FANTASY? 26 2.2 MEMS AND
NEMS DEFINITIONS 27 2.3 INTRODUCTION TO TAXONOMY OF NANO- AND
MICROSYSTEMS SYNTHESIS AND DESIGN 34 2.4 INTRODUCTION TO DESIGN AND
OPTIMIZATION OF NANO- AND MICROSYSTEMS IN THE BEHAVIORAL DOMAIN 47
HOMEWORK PROBLEMS 51 REFERENCES 52 3 NANO- AND MICROSYSTEMS:
CLASSIFICATION AND CONSIDERATION 3.1 BIOMIMETICS, BIOLOGICAL ANALOGIES,
AND DESIGN OF NEMS AND MEMS 53 3.1.1 BIOMIMETICS FUNDAMENTALS 53 3.1.2
BIOMIMETICS FOR NEMS AND MEMS 55 3.1.3 BIOMIMETICS, NANO-ICS, AND
NANOCOMPUTER ARCHITECTRONICS 57 3.1.4 BIOMIMETICS AND NERVOUS SYSTEMS 61
3.2 MICRO- AND NANOELECTROMECHANICAL SYSTEMS: SCALING LAWS AND
MATHEMATICAL MODELING 63 3.2.1 MECHANICAL SYSTEMS 65 3.2.2 FLUIDIC
SYSTEMS 65 3.2.3 CHEMICAL (BIOLOGICAL) SYSTEMS 65 3.2.4 THERMAL SYSTEMS
65 3.2.5 ELECTROMAGNETIC SYSTEMS 65 3.3 MEMS EXAMPLES AND MEMS
ARCHITECTURES 69 3.3.1 MEMS EXAMPLES 69 3.3.2 NANOSTRUCTURES: GIANT
MAGNETORESISTANCE AND MULTILAYERED NANOSTRUCTURE 72 3.3.3 INTEGRATION OF
MICROACTUATORS AND ICS 74 3.3.4 MICROELECTROMECHANICAL SYSTEMS
DEFINITIONS 76 3.3.5 MEMS AND NEMS ARCHITECTURES 77 3.3.5.1 LINKAGE
CROUPS IN MOLECULAR BUILDING BLOCKS 84 3.4 INTRODUCTION TO
MICROFABRICATION AND MICROMACHINING 86 3.4.1 THIN-FILM DEPOSITION 89
3.4.2 PHOTOLITHOGRAPHY 91 3.4.3 ETCHING 92 3.4.4 ICS AND
MICROFABRICATION 92 HOMEWORK PROBLEMS 93 REFERENCES 94 4 FUNDAMENTALS OF
MICROFABRICATION AND MEMS FABRICATION TECHNOLOGIES 4.1 INTRODUCTION AND
DESCRIPTION OF BASIC PROCESSES IN MICROFABRICATION 97 4.1.1
PHOTOLITHOGRAPHY 99 4.1.2 ETCHING 102 4.1.3 BONDING 103 4.1.4
INTRODUCTION TO MEMS FABRICATION AND WEB SITE RESOURCES 104 4.2
MICROFABRICATION AND MICROMACHINING OF ICS, MICROSTRUCTURES, AND
MICRODEVICES 107 4.2.1 OXIDATION 109 4.2.2 PHOTOLITHOGRAPHY 109 4.2.3
ETCHING HO 4.2.4 DOPING 111 4.2.5 METALLIZATION 112 4.2.6 DEPOSITION 113
4.2.7 MEMS ASSEMBLING AND PACKAGING 113 4.3 MEMS FABRICATION
TECHNOLOGIES 114 4.3.1 BULK MICROMACHINING 115 4.3.2 SURFACE
MICROMACHINING 119 4.3.2.1 EXAMPLE PROCESS 122 4.3.3 HIGH-ASPECT-RATIO
(LIGA AND LIGA-LIKE) TECHNOLOGY 127 HOMEWORK PROBLEMS 131 REFERENCES 132
5 DEVISING AND SYNTHESIS OF NEMS AND MEMS 5.1 MOTION NANO- AND
MICRODEVICES: SYNTHESIS AND CLASSIFICATION 135 5.1.1 CARDINALITY 143
5.1.2 ALGEBRA OF SETS 144 5.1.3 SETS ANDLATTICES 146 5.2
MICROACCELEROMETERS AS MICROELECTROMECHANICAL MICRODEVICES 150 5.3
OPTIMIZATION WITH APPLICATION TO SYNTHESIS AND CLASSIFICATION SOLVER 156
5.3.1 ILLUSTRATIVE EXAMPLES OF THE MATLAB APPLICATION 157 5.3.2 LINEAR
PROGRAMMING 158 5.3.3 NONLINEAR PROGRAMMING 159 5.4 NANOENGINEERING
BIOINFORMATICS AND ITS APPLICATION 166 5.4.1 INTRODUCTION AND
DEFINITIONS 166 5.4.2 BASIC BIOSCIENCE FUNDAMENTALS 167 5.4.3
BIOINFORMATICS AND ITS APPLICATIONS TO ESCHERICHIA COLI BACTERIA 180
5.4.4 SEQUENTIAL, FOURIER TRANSFORM AND AUTOCORRELATION ANALYSIS IN
GENOME ANALYSIS 180 5.4.5 ENTROPY ANALYSIS 185 REFERENCES 189 6 MODELING
OF MICRO- AND NANOSCALE ELECTROMECHANICAL SYSTEMS AND DEVICES 6.1
INTRODUCTION TO MODELING, ANALYSIS, AND SIMULATION 191 6.2 BASIC
ELECTROMAGNETICS WITH APPLICATIONS TO MEMS AND NEMS 194 6.3 MODEL
DEVELOPMENTS OF MICRO- AND NANOACTUATORS USING ELECTROMAGNETICS 213
6.3.1 LUMPED-PARAMETER MATHEMATICAL MODELS OF MEMS 217 6.3.2 ENERGY
CONVERSION IN NEMS AND MEMS 221 6.4 CLASSICAL MECHANICS AND ITS
APPLICATION TO MEMS 227 6.4.1 NEWTONIAN MECHANICS 230 6.4.1.1 NEWTONIAN
MECHANICS, ENERGY ANALYSIS, GENERALIZED COORDINATES, AND LAGRANGE
EQUATIONS: TRANSLATIONAL MOTION 230 6.4.1.2 NEWTONIAN MECHANICS:
ROTATIONAL MOTION 237 6.4.1.3 FRICTION MODELS IN MICROELECTROMECHANICAL
SYSTEMS 241 6.4.2 LAGRANGE EQUATIONS OF MOTION 243 6.4.3 HAMILTON
EQUATIONS OF MOTION 259 6.5 DIRECT-CURRENT MICROMACHINES 261 6.6
SIMULATION OF MEMS IN THE MATLAB ENVIRONMENT WITH EXAMPLES 266 6.7
INDUCTION MICROMACHINES 275 6.7.1 INTRODUCTION AND ANALOGIES 275 6.7.2
TWO-PHASE INDUCTION MICROMOTORS 277 6.7.2.1 CONTROL OF INDUCTION
MICROMOTORS 277 6.7.2.2 MODELING OF INDUCTION MICROMOTORS 280 6.7.2.2.1
MODELING OF INDUCTION MICROMOTORS USING KIRCHHOFES AND NEWTON S LAWS 281
6.7.2.2.2 MODELING OF INDUCTION MICROMOTORS USING THE LAGRANGE EQUATIONS
287 6.7.2.2.3 S-DOMAIN BLOCK DIAGRAM OF TWO-PHASE INDUCTION MICROMOTORS
289 6.7.3 THREE-PHASE INDUCTION MICROMOTORS 289 6.7.3.1 DYNAMICS OF
INDUCTION MICROMOTORS IN THE MACHINE VARIABLES 290 6.7.3.2 DYNAMICS OF
INDUCTION MICROMOTORS IN THE ARBITRARY REFERENCE FRAME 295 6.7.3.3
SIMULATION OF INDUCTION MICROMACHINES IN THE MATLAB ENVIRONMENT 306 6.8
SYNCHRONOUS MICROMACHINES 313 6.8.1 INTRODUCTION AND ANALOGIES 313 6.8.2
AXIAL TOPOLOGY PERMANENT-MAGNET SYNCHRONOUS MICROMACHINES 314 6.8.2.1
FUNDAMENTALS OF AXIAL TOPOLOGY PERMANENT-MAGNET SYNCHRONOUS
MICROMACHINES 314 6.8.2.2 MATHEMATICAL MODELS OF AXIAL TOPOLOGY
PERMANENT-MAGNET SYNCHRONOUS MICROMACHINES 318 6.8.2.2.1
LUMPED-PARAMETER MODELING AND MATHEMATICAL MODEL DEVELOPMENT 319
6.8.2.2.2 HIGH-FIDELITY MODELING AND MATHEMATICAL MODEL DEVELOPMENT 326
6.8.3 RADIAL TOPOLOGY SINGLE-PHASE SYNCHRONOUS RELUCTANCE MICROMOTORS
329 6.8.3.1 MATHEMATICAL MODEL OF SYNCHRONOUS RELUCTANCE MICROMOTORS 329
6.8.3.2 SIMULATION OF RELUCTANCE MOTORS 333 6.8.3.3 THREE-PHASE
SYNCHRONOUS RELUCTANCE MICROMOTORS 334 6.8.3.3.1 TORQUE PRODUCTION
ANALYSIS 337 6.8.3.3.2 CONTROL OF SYNCHRONOUS RELUCTANCE MICROMOTORS 337
6.8.3.3.3 LUMPED-PARAMETER MATHEMATICAL MODELS 338 6.8.4 RADIAL TOPOLOGY
PERMANENT-MAGNET SYNCHRONOUS MICROMACHINES 340 6.8.4.1 MATHEMATICAL
MODEL OF TWO-PHASE PERMANENT-MAGNET SYNCHRONOUS MICROMOTORS 340 6.8.4.2
RADIAL TOPOLOGY THREE-PHASE PERMANENT-MAGNET SYNCHRONOUS MICROMACHINES
342 6.8.4.3 MATHEMATICAL MODELS OF PERMANENT-MAGNET SYNCHRONOUS
MICROMACHINES IN THE ARBITRARY, ROTOR, AND SYNCHRONOUS REFERENCE FRAMES
357 6.8.4.4 SIMULATION AND ANALYSIS OF PERMANENT-MAGNET SYNCHRONOUS
MICROMOTORS IN SIMULINK 365 6.9 PERMANENT-MAGNET STEPPER MICROMOTORS 368
6.9.1 MATHEMATICAL MODEL IN THE MACHINE VARIABLES 369 6.9.2 MATHEMATICAL
MODELS OF PERMANENT-MAGNET STEPPER MICROMOTORS IN THE ROTOR AND
SYNCHRONOUS REFERENCE FRAMES 372 6.10 PIEZOTRANSDUCERS 377 6.10.1
PIEZOACTUATORS: STEADY-STATE MODELS AND CHARACTERISTICS 379 6.10.2
MATHEMATICAL MODELS OF PIEZOACTUATORS: DYNAMICS AND NONLINEAR EQUATIONS
OF MOTION 389 6.11 MODELING OF ELECTROMAGNETIC RADIATING ENERGY
MICRODEVICES 392 6.12 THERMODYNAMICS, THERMOANALYSIS, AND HEAT EQUATION
405 HOMEWORK PROBLEMS 407 REFERENCES 413 7 QUANTUM MECHANICS AND ITS
APPLICATIONS 7.1 ATOMIC STRUCTURES AND QUANTUM MECHANICS 415 7.1.1
INTRODUCTION 415 7.1.2 SOME BASIC FUNDAMENTALS 418 7.1.3 QUANTUM THEORY:
BASIC PRINCIPLES 422 7.1.4 HARMONIE OSCILLATOR: NEWTONIAN MECHANICS,
SCHROEDINGER EQUATION, AND QUANTUM THEORY 428 7.1.5 SCHROEDINGER EQUATION
FOR THE HYDROGEN ATOM 445 7.1.6 SOME APPLICATIONS OF THE SCHROEDINGER
EQUATION AND QUANTUM MECHANICS 452 7.1.6.1 MATHEMATICAL MODELING OF
ATOMS WITH MANY ELECTRONS 452 7.1.6.2 EMPIRICAL CONSTANTS CONCEPT 452
7.1.6.3 HARTREE-FOCK MODELING METHOD: SELF-CONSISTENT FIELD THEORY 452
7.2 MOLECULAR AND NANOSTRUCTURE DYNAMICS 453 7.2.1 SCHROEDINGER EQUATION
AND WAVE FUNCTION THEORY 454 7.2.1.1 MATHEMATICAL MODELS: ENERGY-BASED
QUANTUM AND CLASSICAL MECHANICS 455 7.2.2 DENSITY FUNCTIONAL THEORY 459
7.2.3 NANOSTRUCTURES AND MOLECULAR DYNAMICS 462 7.2.4 ELECTROMAGNETIC
FIELDS AND THEIR QUANTIZATION 464 7.3 QUANTUM MECHANICS AND ENERGY BANDS
470 HOMEWORK PROBLEMS 483 REFERENCES 484 8 MOLECULAR AND CARBON
NANOELECTRONICS 8.1 PAST, CURRENT, AND FUTURE OF ELECTRONICS WITH
PROSPECTS FOR 2020 AND BEYOND 487 8.2 FUNDAMENTALS 491 8.3 CARBON
NANOTUBES 494 8.3.1 ANALYSIS OF CARBON NANOTUBES 494 8.3.2
CLASSIFICATION OF CARBON NANOTUBES 501 8.4 CARBON-BASED NANOELECTRONICS
AND THREE-DIMENSIONAL NANO-ICS 505 8.4.1 FULLERENE-CENTERED
NANOELECTRONICS 506 8.4.1.1 HETEROFULLERENES 509 8.4.1.2 ENDOHEDRAL
FULLERENES 512 8.4.2 BIOCENTERED NANOELECTRONICS 516 8.4.3
NANOELECTRONICS AND ANALYSIS OF MOLECULAR ELECTRONIC DEVICES 522
HOMEWORK PROBLEMS 535 REFERENCES 536 9 CONTROL OF MEMS AND NEMS 9.1
CONTINUOUS-TIME AND DISCRETE-TIME MEMS 539 9.2 ANALOG CONTROL OF MEMS
USING TRANSFER FUNCTIONS 546 9.2.1 ANALOG PID CONTROLLERS 546 9.2.2
CONTROL OF A MICROSYSTEM WITH PERMANENT-MAGNET DC MICROMOTOR USING PID
CONTROLLER 551 9.3 THE HAMILTON-JACOBI THEORY AND OPTIMAL CONTROL OF
MEMS AND NEMS 561 9.3.1 STABILIZATION PROBLEM FOR LINEAR MEMS AND NEMS
566 9.3.2 TRACKING PROBLEM FOR LINEAR MEMS AND NEMS 575 9.3.3
TRANSFORMATION METHOD AND TRACKING CONTROL OF LINEAR MEMS 577 9.3.4
TIME-OPTIMAL CONTROL OF MEMS AND NEMS 581 9.4 SLIDING MODE CONTROL OF
MEMS AND NEMS 584 9.4.1 FEEDBACK LINEARIZATION AND CONTROL OF
PERMANENT-MAGNET SYNCHRONOUS MICROMOTORS 589 9.5 CONSTRAINED CONTROL OF
NONLINEAR MEMS AND NEMS 592 9.6 OPTIMIZATION OF MICROSYSTEMS USING
NONQUADRATIC PERFORMANCE FUNCTIONALS 595 9.7 HAMILTON-JACOBI THEORY AND
QUANTUM MECHANICS 601 9.8 LYAPUNOV STABILITY THEORY IN ANALYSIS AND
CONTROL OF MEMS AND NEMS 603 9.9 DIGITAL CONTROL OF MEMS AND NEMS 614
9.9.1 INTRODUCTION TO DIGITAL CONTROL AND TRANSFER FUNCTION CONCEPT 614
9.9.2 CONTROL OF DIGITAL MICROSYSTEMS WITH PERMANENT-MAGNET DC
MICROMOTORS 624 9.9.3 CONTROL OF LINEAR DISCRETE-TIME MEMS AND NEMS
USING THE HAMILTON-JACOBI THEORY 631 9.9.4 CONSTRAINED OPTIMIZATION OF
DISCRETE-TIME MEMS AND NEMS 635 9.9.5 TRACKING CONTROL OF DISCRETE-TIME
MICROSYSTEMS 640 HOMEWORK PROBLEMS 642 REFERENCES 643 10 EXAMPLES IN
SYNTHESIS, ANALYSIS, DESIGN AND FABRICATION OF MEMS 10.1 INTRODUCTION
645 10.2 ANALYSIS OF ENERGY CONVERSION AND MEMS PERFORMANCE FROM
MATERIALS AND FABRICATION VIEWPOINTS 646 10.3 ANALYSIS OF TRANSLATIONAL
MICROTRANSDUCERS 657 10.4 SINGLE-PHASE RELUCTANCE MICROMOTORS: MODELING,
ANALYSIS, AND CONTROL 660 10.5 MICROFABRICATION TOPICS 661 10.5.1
MICROCOILS/MICROWINDINGS FABRICATION THROUGH THE COPPER, NICKEL, AND
ALUMINUM ELECTRODEPOSITION 662 10.5.2 NI X% FE 100 _ X% THIN-FILM
ELECTRODEPOSITION 671 10.5.3 NIFEMO AND NICO THIN-FILM ELECTRODEPOSITION
673 10.5.4 MICROMACHINED POLYMER MAGNETS 674 10.5.5 PLANARIZATION 675
10.6 MAGNETIZATION DYNAMICS OF THIN FILMS 675 10.7 MICROSTRUCTURES AND
MICROTRANSDUCERS WITH PERMANENT-MAGNET: MICROMIRROR ACTUATORS 676 10.7.1
ELECTROMAGNETIC SYSTEM MODELING IN MICROACTUATORS WITH PERMANENT
MAGNETS: HIGH-FIDELITY MODELING AND ANALYSIS 683 10.7.2 ELECTROMAGNETIC
TORQUES AND FORCES: PRELIMINARIES 683 10.7.3 COORDINATE SYSTEMS AND
ELECTROMAGNETIC FIELDS 684 10.7.4 ELECTROMAGNETIC TORQUES AND FORCES 686
10.7.5 SOME OTHER ASPECTS OF MICROACTUATOR DESIGN AND OPTIMIZATION 690
10.8 RELUCTANCE ELECTROMAGNETIC MICROMOTORS 691 10.9 MICROMACHINED
POLYCRYSTALLINE SILICON CARBIDE MICROMOTORS 696 10.10 AXIAL
ELECTROMAGNETIC MICROMOTORS 698 10.11 COGNITIVE COMPUTER-AIDED DESIGN OF
MEMS 699 HOMEWORK PROBLEMS 702 REFERENCES 703 INDEX 705
|
| any_adam_object | 1 |
| author | Lyshevski, Sergey Edward |
| author_GND | (DE-588)123119359 |
| author_facet | Lyshevski, Sergey Edward |
| author_role | aut |
| author_sort | Lyshevski, Sergey Edward |
| author_variant | s e l se sel |
| building | Verbundindex |
| bvnumber | BV019757304 |
| callnumber-first | T - Technology |
| callnumber-label | TK7875 |
| callnumber-raw | TK7875 |
| callnumber-search | TK7875 |
| callnumber-sort | TK 47875 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 3700 ZN 3750 |
| classification_tum | TEC 030f TEC 025f |
| ctrlnum | (OCoLC)56214769 (DE-599)BVBBV019757304 |
| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Technik Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 2. ed. |
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| id | DE-604.BV019757304 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T20:05:26Z |
| institution | BVB |
| isbn | 0849328381 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-013083729 |
| oclc_num | 56214769 |
| open_access_boolean | |
| owner | DE-M347 DE-20 DE-91G DE-BY-TUM DE-526 |
| owner_facet | DE-M347 DE-20 DE-91G DE-BY-TUM DE-526 |
| physical | 722 S. Ill., graph. Darst. |
| publishDate | 2005 |
| publishDateSearch | 2005 |
| publishDateSort | 2005 |
| publisher | CRC Press |
| record_format | marc |
| series2 | Nano- and microscience, engineering, technology, and medicine series |
| spelling | Lyshevski, Sergey Edward Verfasser (DE-588)123119359 aut Nano- and microelectromechanical systems fundamentals of nano- and microengineering Sergey Edward Lyshevski 2. ed. Boca Raton [u.a.] CRC Press 2005 722 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Nano- and microscience, engineering, technology, and medicine series Microeletrônica larpcal Micromachines Nanotechnologie Nanotecnologia larpcal Microelectromechanical systems Nanotechnology Mikromechanik (DE-588)4205811-9 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Elektromechanisches Bauelement (DE-588)4151849-4 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 s DE-604 Mikrosystemtechnik (DE-588)4221617-5 s Elektromechanisches Bauelement (DE-588)4151849-4 s Mikromechanik (DE-588)4205811-9 s GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=013083729&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Lyshevski, Sergey Edward Nano- and microelectromechanical systems fundamentals of nano- and microengineering Microeletrônica larpcal Micromachines Nanotechnologie Nanotecnologia larpcal Microelectromechanical systems Nanotechnology Mikromechanik (DE-588)4205811-9 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd Nanotechnologie (DE-588)4327470-5 gnd Elektromechanisches Bauelement (DE-588)4151849-4 gnd |
| subject_GND | (DE-588)4205811-9 (DE-588)4221617-5 (DE-588)4327470-5 (DE-588)4151849-4 |
| title | Nano- and microelectromechanical systems fundamentals of nano- and microengineering |
| title_auth | Nano- and microelectromechanical systems fundamentals of nano- and microengineering |
| title_exact_search | Nano- and microelectromechanical systems fundamentals of nano- and microengineering |
| title_full | Nano- and microelectromechanical systems fundamentals of nano- and microengineering Sergey Edward Lyshevski |
| title_fullStr | Nano- and microelectromechanical systems fundamentals of nano- and microengineering Sergey Edward Lyshevski |
| title_full_unstemmed | Nano- and microelectromechanical systems fundamentals of nano- and microengineering Sergey Edward Lyshevski |
| title_short | Nano- and microelectromechanical systems |
| title_sort | nano and microelectromechanical systems fundamentals of nano and microengineering |
| title_sub | fundamentals of nano- and microengineering |
| topic | Microeletrônica larpcal Micromachines Nanotechnologie Nanotecnologia larpcal Microelectromechanical systems Nanotechnology Mikromechanik (DE-588)4205811-9 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd Nanotechnologie (DE-588)4327470-5 gnd Elektromechanisches Bauelement (DE-588)4151849-4 gnd |
| topic_facet | Microeletrônica Micromachines Nanotechnologie Nanotecnologia Microelectromechanical systems Nanotechnology Mikromechanik Mikrosystemtechnik Elektromechanisches Bauelement |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=013083729&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT lyshevskisergeyedward nanoandmicroelectromechanicalsystemsfundamentalsofnanoandmicroengineering |