An introduction to surface micromachining:
Saved in:
| Main Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Boston
Kluwer Acad. Publ.
2004
|
| Subjects: | |
| Item Description: | Includes bibliographical references and index |
| Physical Description: | X, 186 S. Ill., graph. Darst. |
| ISBN: | 1402080204 1402080212 |
Staff View
MARC
| LEADER | 00000nam a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV019620847 | ||
| 003 | DE-604 | ||
| 005 | 20050609 | ||
| 007 | t | ||
| 008 | 041206s2004 xxuad|| |||| 00||| eng d | ||
| 010 | |a 2004050720 | ||
| 020 | |a 1402080204 |c alk. paper |9 1-4020-8020-4 | ||
| 020 | |a 1402080212 |9 1-4020-8021-2 | ||
| 035 | |a (OCoLC)55149317 | ||
| 035 | |a (DE-599)BVBBV019620847 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 044 | |a xxu |c US | ||
| 049 | |a DE-91 |a DE-703 | ||
| 050 | 0 | |a TJ1191.5 | |
| 082 | 0 | |a 671.3/5 |2 22 | |
| 084 | |a ZN 4100 |0 (DE-625)157351: |2 rvk | ||
| 084 | |a FER 792f |2 stub | ||
| 100 | 1 | |a Johnstone, Robert W. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a An introduction to surface micromachining |c by Robert W. Johnstone, M. Parameswaran |
| 246 | 1 | 3 | |a An introduction to surface-micromachining |
| 264 | 1 | |a Boston |b Kluwer Acad. Publ. |c 2004 | |
| 300 | |a X, 186 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Includes bibliographical references and index | ||
| 650 | 7 | |a Trabalho em metal |2 larpcal | |
| 650 | 4 | |a aMicromachining | |
| 650 | 0 | 7 | |a Mikrobearbeitung |0 (DE-588)4582923-8 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Mikrobearbeitung |0 (DE-588)4582923-8 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Parameswaran, M. |e Verfasser |4 aut | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-012950233 | ||
Record in the Search Index
| _version_ | 1804132984727535616 |
|---|---|
| any_adam_object | |
| author | Johnstone, Robert W. Parameswaran, M. |
| author_facet | Johnstone, Robert W. Parameswaran, M. |
| author_role | aut aut |
| author_sort | Johnstone, Robert W. |
| author_variant | r w j rw rwj m p mp |
| building | Verbundindex |
| bvnumber | BV019620847 |
| callnumber-first | T - Technology |
| callnumber-label | TJ1191 |
| callnumber-raw | TJ1191.5 |
| callnumber-search | TJ1191.5 |
| callnumber-sort | TJ 41191.5 |
| callnumber-subject | TJ - Mechanical Engineering and Machinery |
| classification_rvk | ZN 4100 |
| classification_tum | FER 792f |
| ctrlnum | (OCoLC)55149317 (DE-599)BVBBV019620847 |
| dewey-full | 671.3/5 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 671 - Metalworking & primary metal products |
| dewey-raw | 671.3/5 |
| dewey-search | 671.3/5 |
| dewey-sort | 3671.3 15 |
| dewey-tens | 670 - Manufacturing |
| discipline | Fertigungstechnik Werkstoffwissenschaften / Fertigungstechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01386nam a2200433zc 4500</leader><controlfield tag="001">BV019620847</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20050609 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">041206s2004 xxuad|| |||| 00||| eng d</controlfield><datafield tag="010" ind1=" " ind2=" "><subfield code="a">2004050720</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1402080204</subfield><subfield code="c">alk. paper</subfield><subfield code="9">1-4020-8020-4</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1402080212</subfield><subfield code="9">1-4020-8021-2</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)55149317</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV019620847</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">xxu</subfield><subfield code="c">US</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield><subfield code="a">DE-703</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TJ1191.5</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">671.3/5</subfield><subfield code="2">22</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4100</subfield><subfield code="0">(DE-625)157351:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">FER 792f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Johnstone, Robert W.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">An introduction to surface micromachining</subfield><subfield code="c">by Robert W. Johnstone, M. Parameswaran</subfield></datafield><datafield tag="246" ind1="1" ind2="3"><subfield code="a">An introduction to surface-micromachining</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Boston</subfield><subfield code="b">Kluwer Acad. Publ.</subfield><subfield code="c">2004</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">X, 186 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Trabalho em metal</subfield><subfield code="2">larpcal</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">aMicromachining</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikrobearbeitung</subfield><subfield code="0">(DE-588)4582923-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Mikrobearbeitung</subfield><subfield code="0">(DE-588)4582923-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Parameswaran, M.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-012950233</subfield></datafield></record></collection> |
| id | DE-604.BV019620847 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T20:01:30Z |
| institution | BVB |
| isbn | 1402080204 1402080212 |
| language | English |
| lccn | 2004050720 |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-012950233 |
| oclc_num | 55149317 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-703 |
| owner_facet | DE-91 DE-BY-TUM DE-703 |
| physical | X, 186 S. Ill., graph. Darst. |
| publishDate | 2004 |
| publishDateSearch | 2004 |
| publishDateSort | 2004 |
| publisher | Kluwer Acad. Publ. |
| record_format | marc |
| spelling | Johnstone, Robert W. Verfasser aut An introduction to surface micromachining by Robert W. Johnstone, M. Parameswaran An introduction to surface-micromachining Boston Kluwer Acad. Publ. 2004 X, 186 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Includes bibliographical references and index Trabalho em metal larpcal aMicromachining Mikrobearbeitung (DE-588)4582923-8 gnd rswk-swf Mikrobearbeitung (DE-588)4582923-8 s DE-604 Parameswaran, M. Verfasser aut |
| spellingShingle | Johnstone, Robert W. Parameswaran, M. An introduction to surface micromachining Trabalho em metal larpcal aMicromachining Mikrobearbeitung (DE-588)4582923-8 gnd |
| subject_GND | (DE-588)4582923-8 |
| title | An introduction to surface micromachining |
| title_alt | An introduction to surface-micromachining |
| title_auth | An introduction to surface micromachining |
| title_exact_search | An introduction to surface micromachining |
| title_full | An introduction to surface micromachining by Robert W. Johnstone, M. Parameswaran |
| title_fullStr | An introduction to surface micromachining by Robert W. Johnstone, M. Parameswaran |
| title_full_unstemmed | An introduction to surface micromachining by Robert W. Johnstone, M. Parameswaran |
| title_short | An introduction to surface micromachining |
| title_sort | an introduction to surface micromachining |
| topic | Trabalho em metal larpcal aMicromachining Mikrobearbeitung (DE-588)4582923-8 gnd |
| topic_facet | Trabalho em metal aMicromachining Mikrobearbeitung |
| work_keys_str_mv | AT johnstonerobertw anintroductiontosurfacemicromachining AT parameswaranm anintroductiontosurfacemicromachining |