Production techniques for application specific microsensors:
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Bibliographic Details
Format: Book
Language:English
Published: Aachen Shaker 2004
Series:Berichte aus der Mikrosystemtechnik
Subjects:
Item Description:Zugl.: Karlsruhe, Univ., Diss., 2004
Physical Description:369 S. Ill., graph. Darst.
ISBN:3832227458

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Interlibrary loan Place Request Caution: Not in THWS collection!