Thin film materials technology: sputtering of compound materials
Saved in:
| Main Authors: | , , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Norwich, NY
Andrew [u.a.]
2004
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| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | XIV, 518 S. Ill., graph. Darst. |
| ISBN: | 0815514832 3540211187 |
Staff View
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| 245 | 1 | 0 | |a Thin film materials technology |b sputtering of compound materials |c by Kiyotaka Wasa ; Makoto Kitabatake ; Hideaki Adachi |
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Record in the Search Index
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| any_adam_object | |
| author | Wasa, Kiyotaka Kitabatake, Makoto Adachi, Hideaki |
| author_facet | Wasa, Kiyotaka Kitabatake, Makoto Adachi, Hideaki |
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| author_sort | Wasa, Kiyotaka |
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| building | Verbundindex |
| bvnumber | BV019340015 |
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| ctrlnum | (OCoLC)248964665 (DE-599)BVBBV019340015 |
| dewey-full | 620 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620 |
| dewey-search | 620 |
| dewey-sort | 3620 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV019340015 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T19:58:00Z |
| institution | BVB |
| isbn | 0815514832 3540211187 |
| language | English |
| lccn | 2003018016 |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-012804588 |
| oclc_num | 248964665 |
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| owner | DE-703 DE-1050 DE-1043 DE-91 DE-BY-TUM DE-384 DE-526 DE-634 |
| owner_facet | DE-703 DE-1050 DE-1043 DE-91 DE-BY-TUM DE-384 DE-526 DE-634 |
| physical | XIV, 518 S. Ill., graph. Darst. |
| publishDate | 2004 |
| publishDateSearch | 2004 |
| publishDateSort | 2004 |
| publisher | Andrew [u.a.] |
| record_format | marc |
| spelling | Wasa, Kiyotaka Verfasser aut Thin film materials technology sputtering of compound materials by Kiyotaka Wasa ; Makoto Kitabatake ; Hideaki Adachi Norwich, NY Andrew [u.a.] 2004 XIV, 518 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Sputtern (DE-588)4182614-0 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 s Sputtern (DE-588)4182614-0 s DE-604 Kitabatake, Makoto Verfasser aut Adachi, Hideaki Verfasser aut http://www.ulb.tu-darmstadt.de/tocs/122180917.pdf Inhaltsverzeichnis |
| spellingShingle | Wasa, Kiyotaka Kitabatake, Makoto Adachi, Hideaki Thin film materials technology sputtering of compound materials Dünnschichttechnik (DE-588)4136339-5 gnd Sputtern (DE-588)4182614-0 gnd |
| subject_GND | (DE-588)4136339-5 (DE-588)4182614-0 |
| title | Thin film materials technology sputtering of compound materials |
| title_auth | Thin film materials technology sputtering of compound materials |
| title_exact_search | Thin film materials technology sputtering of compound materials |
| title_full | Thin film materials technology sputtering of compound materials by Kiyotaka Wasa ; Makoto Kitabatake ; Hideaki Adachi |
| title_fullStr | Thin film materials technology sputtering of compound materials by Kiyotaka Wasa ; Makoto Kitabatake ; Hideaki Adachi |
| title_full_unstemmed | Thin film materials technology sputtering of compound materials by Kiyotaka Wasa ; Makoto Kitabatake ; Hideaki Adachi |
| title_short | Thin film materials technology |
| title_sort | thin film materials technology sputtering of compound materials |
| title_sub | sputtering of compound materials |
| topic | Dünnschichttechnik (DE-588)4136339-5 gnd Sputtern (DE-588)4182614-0 gnd |
| topic_facet | Dünnschichttechnik Sputtern |
| url | http://www.ulb.tu-darmstadt.de/tocs/122180917.pdf |
| work_keys_str_mv | AT wasakiyotaka thinfilmmaterialstechnologysputteringofcompoundmaterials AT kitabatakemakoto thinfilmmaterialstechnologysputteringofcompoundmaterials AT adachihideaki thinfilmmaterialstechnologysputteringofcompoundmaterials |