Chemical vapor deposition polymerization: the growth and properties of parylene thin films
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Boston [u.a.]
Kluwer Academic Publishers
2004
|
| Subjects: | |
| Physical Description: | XVI, 102 S. Ill., graph. Darst. |
| ISBN: | 1402076886 9781402076886 |
Staff View
MARC
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| 100 | 1 | |a Fortin, Jeffrey B. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Chemical vapor deposition polymerization |b the growth and properties of parylene thin films |c by Jeffrey B. Fortin ; Toh-Ming Lu |
| 264 | 1 | |a Boston [u.a.] |b Kluwer Academic Publishers |c 2004 | |
| 300 | |a XVI, 102 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 4 | |a Couches minces | |
| 650 | 4 | |a Dépôt chimique en phase vapeur | |
| 650 | 4 | |a Chemical vapor deposition | |
| 650 | 4 | |a Thin films | |
| 650 | 0 | 7 | |a Polymerisation |0 (DE-588)4046704-1 |2 gnd |9 rswk-swf |
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| 689 | 0 | 0 | |a Parylene |0 (DE-588)4350768-2 |D s |
| 689 | 0 | 1 | |a Polymerisation |0 (DE-588)4046704-1 |D s |
| 689 | 0 | 2 | |a CVD-Verfahren |0 (DE-588)4009846-1 |D s |
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| 700 | 1 | |a Lu, Toh-Ming |e Sonstige |4 oth | |
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Record in the Search Index
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| author | Fortin, Jeffrey B. |
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| ctrlnum | (OCoLC)53156157 (DE-599)BVBBV019331137 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
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| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Chemie Elektrotechnik / Elektronik / Nachrichtentechnik |
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| id | DE-604.BV019331137 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T19:57:47Z |
| institution | BVB |
| isbn | 1402076886 9781402076886 |
| language | English |
| lccn | 2003065275 |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-012796155 |
| oclc_num | 53156157 |
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| owner | DE-703 DE-91G DE-BY-TUM DE-19 DE-BY-UBM |
| owner_facet | DE-703 DE-91G DE-BY-TUM DE-19 DE-BY-UBM |
| physical | XVI, 102 S. Ill., graph. Darst. |
| publishDate | 2004 |
| publishDateSearch | 2004 |
| publishDateSort | 2004 |
| publisher | Kluwer Academic Publishers |
| record_format | marc |
| spelling | Fortin, Jeffrey B. Verfasser aut Chemical vapor deposition polymerization the growth and properties of parylene thin films by Jeffrey B. Fortin ; Toh-Ming Lu Boston [u.a.] Kluwer Academic Publishers 2004 XVI, 102 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Couches minces Dépôt chimique en phase vapeur Chemical vapor deposition Thin films Polymerisation (DE-588)4046704-1 gnd rswk-swf Parylene (DE-588)4350768-2 gnd rswk-swf CVD-Verfahren (DE-588)4009846-1 gnd rswk-swf Parylene (DE-588)4350768-2 s Polymerisation (DE-588)4046704-1 s CVD-Verfahren (DE-588)4009846-1 s DE-604 Lu, Toh-Ming Sonstige oth |
| spellingShingle | Fortin, Jeffrey B. Chemical vapor deposition polymerization the growth and properties of parylene thin films Couches minces Dépôt chimique en phase vapeur Chemical vapor deposition Thin films Polymerisation (DE-588)4046704-1 gnd Parylene (DE-588)4350768-2 gnd CVD-Verfahren (DE-588)4009846-1 gnd |
| subject_GND | (DE-588)4046704-1 (DE-588)4350768-2 (DE-588)4009846-1 |
| title | Chemical vapor deposition polymerization the growth and properties of parylene thin films |
| title_auth | Chemical vapor deposition polymerization the growth and properties of parylene thin films |
| title_exact_search | Chemical vapor deposition polymerization the growth and properties of parylene thin films |
| title_full | Chemical vapor deposition polymerization the growth and properties of parylene thin films by Jeffrey B. Fortin ; Toh-Ming Lu |
| title_fullStr | Chemical vapor deposition polymerization the growth and properties of parylene thin films by Jeffrey B. Fortin ; Toh-Ming Lu |
| title_full_unstemmed | Chemical vapor deposition polymerization the growth and properties of parylene thin films by Jeffrey B. Fortin ; Toh-Ming Lu |
| title_short | Chemical vapor deposition polymerization |
| title_sort | chemical vapor deposition polymerization the growth and properties of parylene thin films |
| title_sub | the growth and properties of parylene thin films |
| topic | Couches minces Dépôt chimique en phase vapeur Chemical vapor deposition Thin films Polymerisation (DE-588)4046704-1 gnd Parylene (DE-588)4350768-2 gnd CVD-Verfahren (DE-588)4009846-1 gnd |
| topic_facet | Couches minces Dépôt chimique en phase vapeur Chemical vapor deposition Thin films Polymerisation Parylene CVD-Verfahren |
| work_keys_str_mv | AT fortinjeffreyb chemicalvapordepositionpolymerizationthegrowthandpropertiesofparylenethinfilms AT lutohming chemicalvapordepositionpolymerizationthegrowthandpropertiesofparylenethinfilms |