Proceedings of Symposium M on Optical and X-Ray Metrology for Advanced Device Materials Characterization, of the E-MRS 2003 Spring Conference: Strasbourg, France, June 10 - 13, 2003
Saved in:
| Corporate Author: | |
|---|---|
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Amsterdam u.a.
Elsevier
2004
|
| Series: | Thin solid films
450,1 |
| Subjects: | |
| Item Description: | Einzelaufn. eines Zeitschr.-H. |
| Physical Description: | 231 S. Ill., graph. Darst. |
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| id | DE-604.BV017931527 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T19:23:20Z |
| institution | BVB |
| institution_GND | (DE-588)5558470-6 |
| language | English |
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| physical | 231 S. Ill., graph. Darst. |
| publishDate | 2004 |
| publishDateSearch | 2004 |
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| publisher | Elsevier |
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| series2 | Thin solid films |
| spelling | Symposium on Optical and X-Ray Metrology for Advanced Device Materials Characterization 2003 Straßburg Verfasser (DE-588)5558470-6 aut Proceedings of Symposium M on Optical and X-Ray Metrology for Advanced Device Materials Characterization, of the E-MRS 2003 Spring Conference Strasbourg, France, June 10 - 13, 2003 Proceedings ed.: Daniel Chateigner ... Amsterdam u.a. Elsevier 2004 231 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Thin solid films 450,1 Einzelaufn. eines Zeitschr.-H. Optische Messtechnik (DE-588)4172667-4 gnd rswk-swf Messtechnik (DE-588)4114575-6 gnd rswk-swf Röntgenstrahlung (DE-588)4129728-3 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2003 Straßburg gnd-content Optische Messtechnik (DE-588)4172667-4 s DE-604 Röntgenstrahlung (DE-588)4129728-3 s Messtechnik (DE-588)4114575-6 s Chateigner, Daniel Sonstige oth |
| spellingShingle | Proceedings of Symposium M on Optical and X-Ray Metrology for Advanced Device Materials Characterization, of the E-MRS 2003 Spring Conference Strasbourg, France, June 10 - 13, 2003 Optische Messtechnik (DE-588)4172667-4 gnd Messtechnik (DE-588)4114575-6 gnd Röntgenstrahlung (DE-588)4129728-3 gnd |
| subject_GND | (DE-588)4172667-4 (DE-588)4114575-6 (DE-588)4129728-3 (DE-588)1071861417 |
| title | Proceedings of Symposium M on Optical and X-Ray Metrology for Advanced Device Materials Characterization, of the E-MRS 2003 Spring Conference Strasbourg, France, June 10 - 13, 2003 |
| title_auth | Proceedings of Symposium M on Optical and X-Ray Metrology for Advanced Device Materials Characterization, of the E-MRS 2003 Spring Conference Strasbourg, France, June 10 - 13, 2003 |
| title_exact_search | Proceedings of Symposium M on Optical and X-Ray Metrology for Advanced Device Materials Characterization, of the E-MRS 2003 Spring Conference Strasbourg, France, June 10 - 13, 2003 |
| title_full | Proceedings of Symposium M on Optical and X-Ray Metrology for Advanced Device Materials Characterization, of the E-MRS 2003 Spring Conference Strasbourg, France, June 10 - 13, 2003 Proceedings ed.: Daniel Chateigner ... |
| title_fullStr | Proceedings of Symposium M on Optical and X-Ray Metrology for Advanced Device Materials Characterization, of the E-MRS 2003 Spring Conference Strasbourg, France, June 10 - 13, 2003 Proceedings ed.: Daniel Chateigner ... |
| title_full_unstemmed | Proceedings of Symposium M on Optical and X-Ray Metrology for Advanced Device Materials Characterization, of the E-MRS 2003 Spring Conference Strasbourg, France, June 10 - 13, 2003 Proceedings ed.: Daniel Chateigner ... |
| title_short | Proceedings of Symposium M on Optical and X-Ray Metrology for Advanced Device Materials Characterization, of the E-MRS 2003 Spring Conference |
| title_sort | proceedings of symposium m on optical and x ray metrology for advanced device materials characterization of the e mrs 2003 spring conference strasbourg france june 10 13 2003 |
| title_sub | Strasbourg, France, June 10 - 13, 2003 |
| topic | Optische Messtechnik (DE-588)4172667-4 gnd Messtechnik (DE-588)4114575-6 gnd Röntgenstrahlung (DE-588)4129728-3 gnd |
| topic_facet | Optische Messtechnik Messtechnik Röntgenstrahlung Konferenzschrift 2003 Straßburg |
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