Symposium on Optical and X-Ray Metrology for Advanced Device Materials Characterization Straßburg. (2004). Proceedings of Symposium M on Optical and X-Ray Metrology for Advanced Device Materials Characterization, of the E-MRS 2003 Spring Conference: Strasbourg, France, June 10 - 13, 2003. Elsevier.
Chicago-Zitierstil (17. Ausg.)Symposium on Optical and X-Ray Metrology for Advanced Device Materials Characterization Straßburg. Proceedings of Symposium M on Optical and X-Ray Metrology for Advanced Device Materials Characterization, of the E-MRS 2003 Spring Conference: Strasbourg, France, June 10 - 13, 2003. Amsterdam u.a: Elsevier, 2004.
MLA-Zitierstil (9. Ausg.)Symposium on Optical and X-Ray Metrology for Advanced Device Materials Characterization Straßburg. Proceedings of Symposium M on Optical and X-Ray Metrology for Advanced Device Materials Characterization, of the E-MRS 2003 Spring Conference: Strasbourg, France, June 10 - 13, 2003. Elsevier, 2004.