Papers from the 14th International Vacuum Microelectronics Conference: 12 - 16 August 2001, Davis, California
Saved in:
| Corporate Author: | |
|---|---|
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
New York
AVS
2003
|
| Series: | Journal of vacuum science & technology : B
21,1 |
| Subjects: | |
| Physical Description: | S. 337 - 630 Ill., graph. Darst. |
Staff View
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV016997520 | ||
| 003 | DE-604 | ||
| 005 | 20070510 | ||
| 007 | t | ||
| 008 | 030320s2003 ad|| |||| 10||| eng d | ||
| 035 | |a (OCoLC)437138736 | ||
| 035 | |a (DE-599)BVBBV016997520 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-384 |a DE-706 | ||
| 111 | 2 | |a International Vacuum Microelectronics Conference |n 14 |d 2001 |c Davis, Calif. |j Verfasser |0 (DE-588)10032192-6 |4 aut | |
| 245 | 1 | 0 | |a Papers from the 14th International Vacuum Microelectronics Conference |b 12 - 16 August 2001, Davis, California |c ed. for the conference: Charles E. Hunt |
| 264 | 1 | |a New York |b AVS |c 2003 | |
| 300 | |a S. 337 - 630 |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Journal of vacuum science & technology : B |v 21,1 | |
| 650 | 0 | 7 | |a Vakuumelektronik |0 (DE-588)4214651-3 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 2001 |z Davis Calif. |2 gnd-content | |
| 689 | 0 | 0 | |a Vakuumelektronik |0 (DE-588)4214651-3 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Hunt, Charles E. |e Sonstige |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-010259659 | ||
Record in the Search Index
| _version_ | 1804129905491836928 |
|---|---|
| any_adam_object | |
| author_corporate | International Vacuum Microelectronics Conference Davis, Calif |
| author_corporate_role | aut |
| author_facet | International Vacuum Microelectronics Conference Davis, Calif |
| author_sort | International Vacuum Microelectronics Conference Davis, Calif |
| building | Verbundindex |
| bvnumber | BV016997520 |
| ctrlnum | (OCoLC)437138736 (DE-599)BVBBV016997520 |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01190nam a2200313 cb4500</leader><controlfield tag="001">BV016997520</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20070510 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">030320s2003 ad|| |||| 10||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)437138736</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV016997520</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-384</subfield><subfield code="a">DE-706</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">International Vacuum Microelectronics Conference</subfield><subfield code="n">14</subfield><subfield code="d">2001</subfield><subfield code="c">Davis, Calif.</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)10032192-6</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Papers from the 14th International Vacuum Microelectronics Conference</subfield><subfield code="b">12 - 16 August 2001, Davis, California</subfield><subfield code="c">ed. for the conference: Charles E. Hunt</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York</subfield><subfield code="b">AVS</subfield><subfield code="c">2003</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">S. 337 - 630</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Journal of vacuum science & technology : B</subfield><subfield code="v">21,1</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Vakuumelektronik</subfield><subfield code="0">(DE-588)4214651-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">2001</subfield><subfield code="z">Davis Calif.</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Vakuumelektronik</subfield><subfield code="0">(DE-588)4214651-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Hunt, Charles E.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-010259659</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 2001 Davis Calif. gnd-content |
| genre_facet | Konferenzschrift 2001 Davis Calif. |
| id | DE-604.BV016997520 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T19:12:34Z |
| institution | BVB |
| institution_GND | (DE-588)10032192-6 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-010259659 |
| oclc_num | 437138736 |
| open_access_boolean | |
| owner | DE-384 DE-706 |
| owner_facet | DE-384 DE-706 |
| physical | S. 337 - 630 Ill., graph. Darst. |
| publishDate | 2003 |
| publishDateSearch | 2003 |
| publishDateSort | 2003 |
| publisher | AVS |
| record_format | marc |
| series2 | Journal of vacuum science & technology : B |
| spelling | International Vacuum Microelectronics Conference 14 2001 Davis, Calif. Verfasser (DE-588)10032192-6 aut Papers from the 14th International Vacuum Microelectronics Conference 12 - 16 August 2001, Davis, California ed. for the conference: Charles E. Hunt New York AVS 2003 S. 337 - 630 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology : B 21,1 Vakuumelektronik (DE-588)4214651-3 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2001 Davis Calif. gnd-content Vakuumelektronik (DE-588)4214651-3 s DE-604 Hunt, Charles E. Sonstige oth |
| spellingShingle | Papers from the 14th International Vacuum Microelectronics Conference 12 - 16 August 2001, Davis, California Vakuumelektronik (DE-588)4214651-3 gnd |
| subject_GND | (DE-588)4214651-3 (DE-588)1071861417 |
| title | Papers from the 14th International Vacuum Microelectronics Conference 12 - 16 August 2001, Davis, California |
| title_auth | Papers from the 14th International Vacuum Microelectronics Conference 12 - 16 August 2001, Davis, California |
| title_exact_search | Papers from the 14th International Vacuum Microelectronics Conference 12 - 16 August 2001, Davis, California |
| title_full | Papers from the 14th International Vacuum Microelectronics Conference 12 - 16 August 2001, Davis, California ed. for the conference: Charles E. Hunt |
| title_fullStr | Papers from the 14th International Vacuum Microelectronics Conference 12 - 16 August 2001, Davis, California ed. for the conference: Charles E. Hunt |
| title_full_unstemmed | Papers from the 14th International Vacuum Microelectronics Conference 12 - 16 August 2001, Davis, California ed. for the conference: Charles E. Hunt |
| title_short | Papers from the 14th International Vacuum Microelectronics Conference |
| title_sort | papers from the 14th international vacuum microelectronics conference 12 16 august 2001 davis california |
| title_sub | 12 - 16 August 2001, Davis, California |
| topic | Vakuumelektronik (DE-588)4214651-3 gnd |
| topic_facet | Vakuumelektronik Konferenzschrift 2001 Davis Calif. |
| work_keys_str_mv | AT internationalvacuummicroelectronicsconferencedaviscalif papersfromthe14thinternationalvacuummicroelectronicsconference1216august2001daviscalifornia AT huntcharlese papersfromthe14thinternationalvacuummicroelectronicsconference1216august2001daviscalifornia |