Papers from the 46th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication: 28 - 31 May 2002, ... Anaheim, Ca.
Saved in:
| Corporate Author: | |
|---|---|
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
New York
American Inst. of Physics
2002
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| Series: | Journal of vacuum science & technology / B
20,6 |
| Subjects: | |
| Item Description: | Einzelaufnahme eines Zeitschr.-H. |
| Physical Description: | S. 2551 - 3120 graph. Darst. |
Staff View
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| 245 | 1 | 0 | |a Papers from the 46th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |b 28 - 31 May 2002, ... Anaheim, Ca. |c ed. for the proceedings: Roderick R. Kunz |
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| genre_facet | Konferenzschrift 28.05.2002-31.05.2002 Anaheim Calif. |
| id | DE-604.BV016435321 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T19:10:26Z |
| institution | BVB |
| institution_GND | (DE-588)5546932-2 |
| language | English |
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| physical | S. 2551 - 3120 graph. Darst. |
| publishDate | 2002 |
| publishDateSearch | 2002 |
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| publisher | American Inst. of Physics |
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| series2 | Journal of vacuum science & technology / B |
| spelling | International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 46 2002 Anaheim, Calif. Verfasser (DE-588)5546932-2 aut Papers from the 46th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 28 - 31 May 2002, ... Anaheim, Ca. ed. for the proceedings: Roderick R. Kunz New York American Inst. of Physics 2002 S. 2551 - 3120 graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology / B 20,6 Einzelaufnahme eines Zeitschr.-H. Teilchenstrahl (DE-588)4165339-7 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 28.05.2002-31.05.2002 Anaheim Calif. gnd-content Nanotechnologie (DE-588)4327470-5 s Teilchenstrahl (DE-588)4165339-7 s DE-604 Kunz, Roderick R. Sonstige oth |
| spellingShingle | Papers from the 46th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 28 - 31 May 2002, ... Anaheim, Ca. Teilchenstrahl (DE-588)4165339-7 gnd Nanotechnologie (DE-588)4327470-5 gnd |
| subject_GND | (DE-588)4165339-7 (DE-588)4327470-5 (DE-588)1071861417 |
| title | Papers from the 46th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 28 - 31 May 2002, ... Anaheim, Ca. |
| title_auth | Papers from the 46th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 28 - 31 May 2002, ... Anaheim, Ca. |
| title_exact_search | Papers from the 46th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 28 - 31 May 2002, ... Anaheim, Ca. |
| title_full | Papers from the 46th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 28 - 31 May 2002, ... Anaheim, Ca. ed. for the proceedings: Roderick R. Kunz |
| title_fullStr | Papers from the 46th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 28 - 31 May 2002, ... Anaheim, Ca. ed. for the proceedings: Roderick R. Kunz |
| title_full_unstemmed | Papers from the 46th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 28 - 31 May 2002, ... Anaheim, Ca. ed. for the proceedings: Roderick R. Kunz |
| title_short | Papers from the 46th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| title_sort | papers from the 46th international conference on electron ion and photon beam technology and nanofabrication 28 31 may 2002 anaheim ca |
| title_sub | 28 - 31 May 2002, ... Anaheim, Ca. |
| topic | Teilchenstrahl (DE-588)4165339-7 gnd Nanotechnologie (DE-588)4327470-5 gnd |
| topic_facet | Teilchenstrahl Nanotechnologie Konferenzschrift 28.05.2002-31.05.2002 Anaheim Calif. |
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