APA (7th ed.) Citation

International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication Anaheim, Calif. (2002). Papers from the 46th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication: 28 - 31 May 2002, ... Anaheim, Ca. American Inst. of Physics.

Chicago Style (17th ed.) Citation

International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication Anaheim, Calif. Papers from the 46th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication: 28 - 31 May 2002, ... Anaheim, Ca. New York: American Inst. of Physics, 2002.

MLA (9th ed.) Citation

International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication Anaheim, Calif. Papers from the 46th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication: 28 - 31 May 2002, ... Anaheim, Ca. American Inst. of Physics, 2002.