SiO 2 in Si microdevices: with 25 tables
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Berlin [u.a.]
Springer
2002
Tokyo Kodansha |
| Series: | Springer series in materials science
56 |
| Subjects: | |
| Physical Description: | XIII, 322 S. Ill., graph. Darst. |
| ISBN: | 3540433392 4062106671 |
Staff View
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| id | DE-604.BV014569153 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T19:03:42Z |
| institution | BVB |
| isbn | 3540433392 4062106671 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009906282 |
| oclc_num | 634646526 |
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| owner | DE-634 DE-83 DE-11 |
| owner_facet | DE-634 DE-83 DE-11 |
| physical | XIII, 322 S. Ill., graph. Darst. |
| publishDate | 2002 |
| publishDateSearch | 2002 |
| publishDateSort | 2002 |
| publisher | Springer Kodansha |
| record_format | marc |
| series | Springer series in materials science |
| series2 | Springer series in materials science Physics and astronomy online liberary |
| spelling | Itsumi, Manabu Verfasser aut SiO 2 in Si microdevices with 25 tables Manabu Itsumi SiO2 in Si microdevices Berlin [u.a.] Springer 2002 Tokyo Kodansha XIII, 322 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Springer series in materials science 56 Physics and astronomy online liberary Siliciumdioxid (DE-588)4077447-8 gnd rswk-swf Siliciumbauelement (DE-588)4181368-6 gnd rswk-swf Siliciumbauelement (DE-588)4181368-6 s Siliciumdioxid (DE-588)4077447-8 s DE-604 Springer series in materials science 56 (DE-604)BV000683335 56 |
| spellingShingle | Itsumi, Manabu SiO 2 in Si microdevices with 25 tables Springer series in materials science Siliciumdioxid (DE-588)4077447-8 gnd Siliciumbauelement (DE-588)4181368-6 gnd |
| subject_GND | (DE-588)4077447-8 (DE-588)4181368-6 |
| title | SiO 2 in Si microdevices with 25 tables |
| title_alt | SiO2 in Si microdevices |
| title_auth | SiO 2 in Si microdevices with 25 tables |
| title_exact_search | SiO 2 in Si microdevices with 25 tables |
| title_full | SiO 2 in Si microdevices with 25 tables Manabu Itsumi |
| title_fullStr | SiO 2 in Si microdevices with 25 tables Manabu Itsumi |
| title_full_unstemmed | SiO 2 in Si microdevices with 25 tables Manabu Itsumi |
| title_short | SiO 2 in Si microdevices |
| title_sort | sio 2 in si microdevices with 25 tables |
| title_sub | with 25 tables |
| topic | Siliciumdioxid (DE-588)4077447-8 gnd Siliciumbauelement (DE-588)4181368-6 gnd |
| topic_facet | Siliciumdioxid Siliciumbauelement |
| volume_link | (DE-604)BV000683335 |
| work_keys_str_mv | AT itsumimanabu sio2insimicrodeviceswith25tables AT itsumimanabu sio2insimicrodevices |