Materials science of microelectromechanical systems (MEMS) devices IV: symposium held November 25 - 28, 2001, Boston, Massachusetts, USA
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Warrendale, Pa.
Materials Research Society
2002
|
| Series: | Materials Research Society symposium proceedings
687 |
| Subjects: | |
| Physical Description: | xi, 318 p. Ill., graph. Darst. |
| ISBN: | 1558996230 |
Staff View
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Record in the Search Index
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| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
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| genre_facet | Konferenzschrift 2001 Boston Mass. |
| id | DE-604.BV014521678 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T19:03:14Z |
| institution | BVB |
| isbn | 1558996230 |
| language | English |
| lccn | 2002071761 |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009887003 |
| oclc_num | 268938138 |
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| owner | DE-703 |
| owner_facet | DE-703 |
| physical | xi, 318 p. Ill., graph. Darst. |
| publishDate | 2002 |
| publishDateSearch | 2002 |
| publishDateSort | 2002 |
| publisher | Materials Research Society |
| record_format | marc |
| series | Materials Research Society symposium proceedings |
| series2 | Materials Research Society symposium proceedings |
| spelling | Materials science of microelectromechanical systems (MEMS) devices IV symposium held November 25 - 28, 2001, Boston, Massachusetts, USA editors, Arturo A. Ayón ... [et al.] Warrendale, Pa. Materials Research Society 2002 xi, 318 p. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society symposium proceedings 687 Microelectromechanical systems Materials Congresses Werkstoff (DE-588)4065579-9 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2001 Boston Mass. gnd-content Werkstoff (DE-588)4065579-9 s Mikromechanik (DE-588)4205811-9 s Mikroelektronik (DE-588)4039207-7 s DE-604 Ayón, Arturo A. Sonstige oth Materials Research Society symposium proceedings 687 (DE-604)BV001899105 687 |
| spellingShingle | Materials science of microelectromechanical systems (MEMS) devices IV symposium held November 25 - 28, 2001, Boston, Massachusetts, USA Materials Research Society symposium proceedings Microelectromechanical systems Materials Congresses Werkstoff (DE-588)4065579-9 gnd Mikromechanik (DE-588)4205811-9 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| subject_GND | (DE-588)4065579-9 (DE-588)4205811-9 (DE-588)4039207-7 (DE-588)1071861417 |
| title | Materials science of microelectromechanical systems (MEMS) devices IV symposium held November 25 - 28, 2001, Boston, Massachusetts, USA |
| title_auth | Materials science of microelectromechanical systems (MEMS) devices IV symposium held November 25 - 28, 2001, Boston, Massachusetts, USA |
| title_exact_search | Materials science of microelectromechanical systems (MEMS) devices IV symposium held November 25 - 28, 2001, Boston, Massachusetts, USA |
| title_full | Materials science of microelectromechanical systems (MEMS) devices IV symposium held November 25 - 28, 2001, Boston, Massachusetts, USA editors, Arturo A. Ayón ... [et al.] |
| title_fullStr | Materials science of microelectromechanical systems (MEMS) devices IV symposium held November 25 - 28, 2001, Boston, Massachusetts, USA editors, Arturo A. Ayón ... [et al.] |
| title_full_unstemmed | Materials science of microelectromechanical systems (MEMS) devices IV symposium held November 25 - 28, 2001, Boston, Massachusetts, USA editors, Arturo A. Ayón ... [et al.] |
| title_short | Materials science of microelectromechanical systems (MEMS) devices IV |
| title_sort | materials science of microelectromechanical systems mems devices iv symposium held november 25 28 2001 boston massachusetts usa |
| title_sub | symposium held November 25 - 28, 2001, Boston, Massachusetts, USA |
| topic | Microelectromechanical systems Materials Congresses Werkstoff (DE-588)4065579-9 gnd Mikromechanik (DE-588)4205811-9 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| topic_facet | Microelectromechanical systems Materials Congresses Werkstoff Mikromechanik Mikroelektronik Konferenzschrift 2001 Boston Mass. |
| volume_link | (DE-604)BV001899105 |
| work_keys_str_mv | AT ayonarturoa materialsscienceofmicroelectromechanicalsystemsmemsdevicesivsymposiumheldnovember25282001bostonmassachusettsusa |