APA (7th ed.) Citation

(2002). Materials science of microelectromechanical systems (MEMS) devices IV: Symposium held November 25 - 28, 2001, Boston, Massachusetts, USA. Materials Research Society.

Chicago Style (17th ed.) Citation

Materials Science of Microelectromechanical Systems (MEMS) Devices IV: Symposium Held November 25 - 28, 2001, Boston, Massachusetts, USA. Warrendale, Pa: Materials Research Society, 2002.

MLA (9th ed.) Citation

Materials Science of Microelectromechanical Systems (MEMS) Devices IV: Symposium Held November 25 - 28, 2001, Boston, Massachusetts, USA. Materials Research Society, 2002.