Introduction to microelectronic fabrication:
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Bibliographic Details
Main Author: Jaeger, Richard C. (Author)
Format: Book
Language:English
Published: Upper Saddle River, N.J. Prentice Hall 2002
Edition:2. ed.
Series:Modular series on solid state devices 5
Subjects:
Physical Description:XIV, 316 S. Ill., graph. Darst.
ISBN:9780201444940
0201444941

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