APA (7th ed.) Citation

Jaeger, R. C. (2002). Introduction to microelectronic fabrication (2. ed.). Prentice Hall.

Chicago Style (17th ed.) Citation

Jaeger, Richard C. Introduction to Microelectronic Fabrication. 2. ed. Upper Saddle River, N.J: Prentice Hall, 2002.

MLA (9th ed.) Citation

Jaeger, Richard C. Introduction to Microelectronic Fabrication. 2. ed. Prentice Hall, 2002.