Microlithographic techniques in integrated circuit fabrication II: 28 - 30 November 2000, Singapore
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash., USA
SPIE
2000
|
| Schriftenreihe: | Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers
4226 |
| Schlagworte: | |
| Beschreibung: | Includes bibliographical references and index |
| Beschreibung: | xv, 194 p. ill. : 28 cm |
| ISBN: | 0819438987 |
Internformat
MARC
| LEADER | 00000nam a2200000zcb4500 | ||
|---|---|---|---|
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| 003 | DE-604 | ||
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| 041 | 0 | |a eng | |
| 044 | |a xxu |c US | ||
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| 084 | |a ZN 4170 |0 (DE-625)157366: |2 rvk | ||
| 245 | 1 | 0 | |a Microlithographic techniques in integrated circuit fabrication II |b 28 - 30 November 2000, Singapore |c Chris A. Mack, Xiaocong Yuan, chairs/ed. |
| 264 | 1 | |a Bellingham, Wash., USA |b SPIE |c 2000 | |
| 300 | |a xv, 194 p. |b ill. : 28 cm | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers |v 4226 | |
| 500 | |a Includes bibliographical references and index | ||
| 650 | 4 | |a Integrated circuits |x Design and construction |v Congresses | |
| 650 | 4 | |a Integrated circuits |x Inspection |v Congresses | |
| 650 | 4 | |a Microlithography |x Industrial applications |v Congresses | |
| 650 | 4 | |a Process control |v Congresses | |
| 650 | 0 | 7 | |a Integrierte Schaltung |0 (DE-588)4027242-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 2000 |z Singapur |2 gnd-content | |
| 689 | 0 | 0 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |D s |
| 689 | 0 | 1 | |a Integrierte Schaltung |0 (DE-588)4027242-4 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Mack, Chris A. |e Sonstige |4 oth | |
| 700 | 1 | |a Yuan, Xiaocong |e Sonstige |4 oth | |
| 810 | 2 | |a Society of Photo-Optical Instrumentation Engineers |t Proceedings of SPIE |v 4226 |w (DE-604)BV000010887 |9 4226 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-009848269 | ||
Datensatz im Suchindex
| _version_ | 1804129256138080256 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV014386132 |
| callnumber-first | T - Technology |
| callnumber-label | TK7874 |
| callnumber-raw | TK7874 TS510 |
| callnumber-search | TK7874 TS510 |
| callnumber-sort | TK 47874 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 4170 |
| ctrlnum | (OCoLC)46338316 (DE-599)BVBBV014386132 |
| dewey-full | 621.3815 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815 |
| dewey-search | 621.3815 |
| dewey-sort | 3621.3815 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| genre | (DE-588)1071861417 Konferenzschrift 2000 Singapur gnd-content |
| genre_facet | Konferenzschrift 2000 Singapur |
| id | DE-604.BV014386132 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T19:02:15Z |
| institution | BVB |
| isbn | 0819438987 |
| language | English |
| lccn | 2001277535 |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009848269 |
| oclc_num | 46338316 |
| open_access_boolean | |
| owner | DE-703 |
| owner_facet | DE-703 |
| physical | xv, 194 p. ill. : 28 cm |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| publisher | SPIE |
| record_format | marc |
| series2 | Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers |
| spelling | Microlithographic techniques in integrated circuit fabrication II 28 - 30 November 2000, Singapore Chris A. Mack, Xiaocong Yuan, chairs/ed. Bellingham, Wash., USA SPIE 2000 xv, 194 p. ill. : 28 cm txt rdacontent n rdamedia nc rdacarrier Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers 4226 Includes bibliographical references and index Integrated circuits Design and construction Congresses Integrated circuits Inspection Congresses Microlithography Industrial applications Congresses Process control Congresses Integrierte Schaltung (DE-588)4027242-4 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2000 Singapur gnd-content Lithografie Halbleitertechnologie (DE-588)4191584-7 s Integrierte Schaltung (DE-588)4027242-4 s DE-604 Mack, Chris A. Sonstige oth Yuan, Xiaocong Sonstige oth Society of Photo-Optical Instrumentation Engineers Proceedings of SPIE 4226 (DE-604)BV000010887 4226 |
| spellingShingle | Microlithographic techniques in integrated circuit fabrication II 28 - 30 November 2000, Singapore Integrated circuits Design and construction Congresses Integrated circuits Inspection Congresses Microlithography Industrial applications Congresses Process control Congresses Integrierte Schaltung (DE-588)4027242-4 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4027242-4 (DE-588)4191584-7 (DE-588)1071861417 |
| title | Microlithographic techniques in integrated circuit fabrication II 28 - 30 November 2000, Singapore |
| title_auth | Microlithographic techniques in integrated circuit fabrication II 28 - 30 November 2000, Singapore |
| title_exact_search | Microlithographic techniques in integrated circuit fabrication II 28 - 30 November 2000, Singapore |
| title_full | Microlithographic techniques in integrated circuit fabrication II 28 - 30 November 2000, Singapore Chris A. Mack, Xiaocong Yuan, chairs/ed. |
| title_fullStr | Microlithographic techniques in integrated circuit fabrication II 28 - 30 November 2000, Singapore Chris A. Mack, Xiaocong Yuan, chairs/ed. |
| title_full_unstemmed | Microlithographic techniques in integrated circuit fabrication II 28 - 30 November 2000, Singapore Chris A. Mack, Xiaocong Yuan, chairs/ed. |
| title_short | Microlithographic techniques in integrated circuit fabrication II |
| title_sort | microlithographic techniques in integrated circuit fabrication ii 28 30 november 2000 singapore |
| title_sub | 28 - 30 November 2000, Singapore |
| topic | Integrated circuits Design and construction Congresses Integrated circuits Inspection Congresses Microlithography Industrial applications Congresses Process control Congresses Integrierte Schaltung (DE-588)4027242-4 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Integrated circuits Design and construction Congresses Integrated circuits Inspection Congresses Microlithography Industrial applications Congresses Process control Congresses Integrierte Schaltung Lithografie Halbleitertechnologie Konferenzschrift 2000 Singapur |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT mackchrisa microlithographictechniquesinintegratedcircuitfabricationii2830november2000singapore AT yuanxiaocong microlithographictechniquesinintegratedcircuitfabricationii2830november2000singapore |