APA (7th ed.) Citation

(2000). Microlithographic techniques in integrated circuit fabrication II: 28 - 30 November 2000, Singapore. SPIE.

Chicago Style (17th ed.) Citation

Microlithographic Techniques in Integrated Circuit Fabrication II: 28 - 30 November 2000, Singapore. Bellingham, Wash., USA: SPIE, 2000.

MLA (9th ed.) Citation

Microlithographic Techniques in Integrated Circuit Fabrication II: 28 - 30 November 2000, Singapore. SPIE, 2000.

Warning: These citations may not always be 100% accurate.