CMOS cantilever sensor systems: atomic force microscopy and gas sensing applications
Saved in:
| Main Authors: | , , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Berlin [u.a.]
Springer
2002
|
| Series: | Microtechnology and MEMS
Physics and astronomy online library |
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Physical Description: | VIII, 142 S. Ill., graph. Darst. |
| ISBN: | 3540431438 |
Staff View
MARC
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Record in the Search Index
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|---|---|
| adam_text | D. LANGE O. BRAND H. BALTES CMOS CANTILEVER SENSOR SYSTEMS ATOMIC FORCE
MICROSCOPY AND GAS SENSING APPLICATIONS WITH 85 FIGURES SPRINGER
CONTENTS 1. INTRODUCTION 1 1.1 CMOS-INTEGRATED SENSOR SYSTEMS 2 1.2
SCOPE OF THIS BOOK 4 2. DESIGN CONSIDERATIONS 7 2.1 RESONANT
BEHAVIOROFCANTILEVERBEAMS 7 2.1.1 RESONANCE FREQUENCY 7 2.1.2 QUALITY
FACTOR 11 2.2 ELECTROTHERMAL EXCITATION 12 2.2.1 VERTICAL TEMPERATURE
DISTRIBUTION 15 2.2.2 HORIZONTAL TEMPERATURE DISTRIBUTION 17 2.2.3 MODAL
ANALYSIS 18 2.3 ELECTROMAGNETIC EXCITATION 21 2.4 PIEZORESISTIVE
DETECTION 22 2.4.1 STRESS-SENSITIVE MOS-TRANSISTORS 24 2.5
CMOS-COMPATIBLE MICROMACHINING 25 2.5.1 ANISOTROPIE ETCHING 26 2.5.2
REACTIVE ION ETCHING 28 2.5.3 WET ETCHING OF SILICON DIOXIDE 29 3.
CANTILEVER BEAM RESONATORS 31 3.1 SYSTEM DESIGN 31 3.2 FABRICATION 33
3.3 RESONANT BEHAVIOR 34 3.3.1 PIEZORESISTIVE DETECTION 36 3.3.2
SPECTRAL RESPONSE AND CROSS TALK 37 3.3.3 QUALITY FACTOR 41 3.4 FEEDBACK
OPERATION 42 3.5 SINGLE-CHIP RESONANT SENSOR SYSTEM 45 3.6
ELECTROMAGNETIC EXCITATION AND MOS-TRANSISTOR DETECTION 45 3.6.1
FABRICATION USING A CANTILEVER-SHAPED N-WELL 48 3.7 TEMPERATURE
INFLUENCES 50 3.8 PRESSURE DEPENDENCE 52 VIII CONTENTS 4. RESONANT GAS
SENSOR 57 4.1 INTRODUCTION 57 4.2 POLYMERS AS SENSITIVE LAYERS 59 4.2.1
PARTITION COEFFICIENT 59 4.2.2 THERMODYNAMIC MODEL OF POLYMER-ANALYTE
INTERACTION 59 4.2.3 SELECTIVITY USING FUNCTIONALYZED POLYMERS 60 4.3
MODELING MASS-SENSITIVE BEHAVIOR 63 4.4 MEASUREMENT SETUP 64 4.5 SPRAY
COATING OF POLYMERS 65 4.6 SENSITIVITY AND RESOLUTION 70 4.6.1
SENSITIVITY 70 4.7 TEMPERATURE DEPENDENCE 75 4.7.1 BASE RESONANCE
FREQUENCY 75 4.7.2 SENSITIVITY 77 4.8 SENSOR ARRAYS FOR DISCRIMINATION
OF MIXTURES 79 5. FORCE SENSORS FOR PARALLEL SCANNING ATOMIC FORCE
MICROSCOPY 85 5.1 ATOMIC FORCE MICROSCOPY 85 5.1.1 INSTRUMENTATION AND
DETECTION PRINCIPLES 87 5.1.2 MODESOF OPERATION 88 5.1.3 CANTILEVERS FOR
AFM 91 5.2 TWO-CANTILEVER ARRAY 93 5.2.1 SYSTEM DESIGN 93 5.2.2
FABRICATION 96 5.2.3 CHARACTERIZATION 99 5.3 COMPACT SCANNING SYSTEM 102
5.4 10-CANTILEVER ARRAY 104 5.4.1 FINITE-ELEMENT SIMULATIONS 105 5.4.2
SYSTEM DESIGN 109 5.4.3 FABRICATION 111 5.4.4 CHARACTERIZATION 114 5.4.5
NANOCHEMICAL SURFACE ANALYZER 118 6. CONCLUSIONS AND OUTLOOK 121 6.1
CONCLUSION 121 6.2 OUTLOOK 122 APPENDICES 125 A.L PROCESS SEQUENCE
RESONANT GAS SENSOR 125 A.2 PROCESS SEQUENCE RESONANT GAS SENSOR
(MASKLESS) 127 A.3 PROCESS SEQUENCE AFM SENSOR ARRAYS 128 A.4 MATERIAL
PROPERTIES OF THIN FILM MATERIALS 129 REFERENCES 131 SUBJECT INDEX 141
|
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| illustrated | Illustrated |
| indexdate | 2024-07-09T19:00:31Z |
| institution | BVB |
| isbn | 3540431438 |
| language | English |
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| physical | VIII, 142 S. Ill., graph. Darst. |
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| spelling | Lange, Dirk Verfasser aut CMOS cantilever sensor systems atomic force microscopy and gas sensing applications D. Lange ; O. Brand ; H. Baltes Berlin [u.a.] Springer 2002 VIII, 142 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Microtechnology and MEMS Physics and astronomy online library Atomic force microscopy Equipment and supplies Design and construction Gas detectors Design and construction Levers Design and construction Metal oxide semiconductors, Complementary Design and construction Microelectromechanical systems Design and construction CMOS (DE-588)4010319-5 gnd rswk-swf Rasterkraftmikroskopie (DE-588)4274473-8 gnd rswk-swf Sensorsystem (DE-588)4307964-7 gnd rswk-swf Gassensor (DE-588)4156050-4 gnd rswk-swf Sensorsystem (DE-588)4307964-7 s CMOS (DE-588)4010319-5 s Rasterkraftmikroskopie (DE-588)4274473-8 s Gassensor (DE-588)4156050-4 s DE-604 Brand, Oliver 1964- Verfasser (DE-588)123279216 aut Baltes, Henry 1941- Verfasser (DE-588)173220479 aut GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009776928&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Lange, Dirk Brand, Oliver 1964- Baltes, Henry 1941- CMOS cantilever sensor systems atomic force microscopy and gas sensing applications Atomic force microscopy Equipment and supplies Design and construction Gas detectors Design and construction Levers Design and construction Metal oxide semiconductors, Complementary Design and construction Microelectromechanical systems Design and construction CMOS (DE-588)4010319-5 gnd Rasterkraftmikroskopie (DE-588)4274473-8 gnd Sensorsystem (DE-588)4307964-7 gnd Gassensor (DE-588)4156050-4 gnd |
| subject_GND | (DE-588)4010319-5 (DE-588)4274473-8 (DE-588)4307964-7 (DE-588)4156050-4 |
| title | CMOS cantilever sensor systems atomic force microscopy and gas sensing applications |
| title_auth | CMOS cantilever sensor systems atomic force microscopy and gas sensing applications |
| title_exact_search | CMOS cantilever sensor systems atomic force microscopy and gas sensing applications |
| title_full | CMOS cantilever sensor systems atomic force microscopy and gas sensing applications D. Lange ; O. Brand ; H. Baltes |
| title_fullStr | CMOS cantilever sensor systems atomic force microscopy and gas sensing applications D. Lange ; O. Brand ; H. Baltes |
| title_full_unstemmed | CMOS cantilever sensor systems atomic force microscopy and gas sensing applications D. Lange ; O. Brand ; H. Baltes |
| title_short | CMOS cantilever sensor systems |
| title_sort | cmos cantilever sensor systems atomic force microscopy and gas sensing applications |
| title_sub | atomic force microscopy and gas sensing applications |
| topic | Atomic force microscopy Equipment and supplies Design and construction Gas detectors Design and construction Levers Design and construction Metal oxide semiconductors, Complementary Design and construction Microelectromechanical systems Design and construction CMOS (DE-588)4010319-5 gnd Rasterkraftmikroskopie (DE-588)4274473-8 gnd Sensorsystem (DE-588)4307964-7 gnd Gassensor (DE-588)4156050-4 gnd |
| topic_facet | Atomic force microscopy Equipment and supplies Design and construction Gas detectors Design and construction Levers Design and construction Metal oxide semiconductors, Complementary Design and construction Microelectromechanical systems Design and construction CMOS Rasterkraftmikroskopie Sensorsystem Gassensor |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009776928&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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