Micromachined devices and components VI: 18 - 19 September 2000, Santa Clara, USA
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Bellingham, Wash.
SPIE
2000
|
| Series: | Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers
4176 |
| Subjects: | |
| Physical Description: | VIII, 282 S. Ill., graph. Darst. |
| ISBN: | 0819438324 |
Staff View
MARC
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Record in the Search Index
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| genre | (DE-588)1071861417 Konferenzschrift 2000 Santa Clara Calif. gnd-content |
| genre_facet | Konferenzschrift 2000 Santa Clara Calif. |
| id | DE-604.BV014090555 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:57:29Z |
| institution | BVB |
| isbn | 0819438324 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009652400 |
| oclc_num | 45410188 |
| open_access_boolean | |
| owner | DE-703 |
| owner_facet | DE-703 |
| physical | VIII, 282 S. Ill., graph. Darst. |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| publisher | SPIE |
| record_format | marc |
| series2 | Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers |
| spelling | Micromachined devices and components VI 18 - 19 September 2000, Santa Clara, USA Eric Peeters ... chairs/ed. Bellingham, Wash. SPIE 2000 VIII, 282 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Proceedings of SPIE / Society of Photo-Optical Instrumentation Engineers 4176 Electromechanical devices Congresses Micromachining Congresses Micromechanics Congresses Mikromechanik (DE-588)4205811-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2000 Santa Clara Calif. gnd-content Mikromechanik (DE-588)4205811-9 s DE-604 Peeters, Eric Sonstige (DE-588)1035555875 oth Society of Photo-Optical Instrumentation Engineers Proceedings of SPIE 4176 (DE-604)BV000010887 4176 |
| spellingShingle | Micromachined devices and components VI 18 - 19 September 2000, Santa Clara, USA Electromechanical devices Congresses Micromachining Congresses Micromechanics Congresses Mikromechanik (DE-588)4205811-9 gnd |
| subject_GND | (DE-588)4205811-9 (DE-588)1071861417 |
| title | Micromachined devices and components VI 18 - 19 September 2000, Santa Clara, USA |
| title_auth | Micromachined devices and components VI 18 - 19 September 2000, Santa Clara, USA |
| title_exact_search | Micromachined devices and components VI 18 - 19 September 2000, Santa Clara, USA |
| title_full | Micromachined devices and components VI 18 - 19 September 2000, Santa Clara, USA Eric Peeters ... chairs/ed. |
| title_fullStr | Micromachined devices and components VI 18 - 19 September 2000, Santa Clara, USA Eric Peeters ... chairs/ed. |
| title_full_unstemmed | Micromachined devices and components VI 18 - 19 September 2000, Santa Clara, USA Eric Peeters ... chairs/ed. |
| title_short | Micromachined devices and components VI |
| title_sort | micromachined devices and components vi 18 19 september 2000 santa clara usa |
| title_sub | 18 - 19 September 2000, Santa Clara, USA |
| topic | Electromechanical devices Congresses Micromachining Congresses Micromechanics Congresses Mikromechanik (DE-588)4205811-9 gnd |
| topic_facet | Electromechanical devices Congresses Micromachining Congresses Micromechanics Congresses Mikromechanik Konferenzschrift 2000 Santa Clara Calif. |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT peeterseric micromachineddevicesandcomponentsvi1819september2000santaclarausa |