APA (7th ed.) Citation

(2000). Micromachined devices and components VI: 18 - 19 September 2000, Santa Clara, USA. SPIE.

Chicago Style (17th ed.) Citation

Micromachined Devices and Components VI: 18 - 19 September 2000, Santa Clara, USA. Bellingham, Wash: SPIE, 2000.

MLA (9th ed.) Citation

Micromachined Devices and Components VI: 18 - 19 September 2000, Santa Clara, USA. SPIE, 2000.

Warning: These citations may not always be 100% accurate.