Introduction to semiconductor manufacturing technology:
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Upper Saddle River, NJ [u.a.]
Prentice Hall
2001
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| Subjects: | |
| Physical Description: | VIII, 647 S. Ill., graph. Darst. |
| ISBN: | 0130224049 |
Staff View
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Record in the Search Index
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| dewey-hundreds | 600 - Technology (Applied sciences) |
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| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
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| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
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| id | DE-604.BV013989192 |
| illustrated | Illustrated |
| indexdate | 2024-09-06T00:13:26Z |
| institution | BVB |
| isbn | 0130224049 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009574732 |
| oclc_num | 247571807 |
| open_access_boolean | |
| owner | DE-703 DE-20 DE-898 DE-BY-UBR DE-29T |
| owner_facet | DE-703 DE-20 DE-898 DE-BY-UBR DE-29T |
| physical | VIII, 647 S. Ill., graph. Darst. |
| publishDate | 2001 |
| publishDateSearch | 2001 |
| publishDateSort | 2001 |
| publisher | Prentice Hall |
| record_format | marc |
| spelling | Xiao, Hong Verfasser aut Introduction to semiconductor manufacturing technology Hong Xiao Upper Saddle River, NJ [u.a.] Prentice Hall 2001 VIII, 647 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Semiconductor industry Semiconductors Design and construction Halbleiter (DE-588)4022993-2 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Fertigung (DE-588)4016899-2 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 s DE-604 Halbleiter (DE-588)4022993-2 s Fertigung (DE-588)4016899-2 s |
| spellingShingle | Xiao, Hong Introduction to semiconductor manufacturing technology Semiconductor industry Semiconductors Design and construction Halbleiter (DE-588)4022993-2 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Fertigung (DE-588)4016899-2 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4158814-9 (DE-588)4016899-2 |
| title | Introduction to semiconductor manufacturing technology |
| title_auth | Introduction to semiconductor manufacturing technology |
| title_exact_search | Introduction to semiconductor manufacturing technology |
| title_full | Introduction to semiconductor manufacturing technology Hong Xiao |
| title_fullStr | Introduction to semiconductor manufacturing technology Hong Xiao |
| title_full_unstemmed | Introduction to semiconductor manufacturing technology Hong Xiao |
| title_short | Introduction to semiconductor manufacturing technology |
| title_sort | introduction to semiconductor manufacturing technology |
| topic | Semiconductor industry Semiconductors Design and construction Halbleiter (DE-588)4022993-2 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Fertigung (DE-588)4016899-2 gnd |
| topic_facet | Semiconductor industry Semiconductors Design and construction Halbleiter Halbleitertechnologie Fertigung |
| work_keys_str_mv | AT xiaohong introductiontosemiconductormanufacturingtechnology |