Excimer laser technology: laser sources, optics, systems and applications
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| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Göttingen
Lambda Physik
2001
|
| Edition: | 1. ed. |
| Subjects: | |
| Online Access: | Inhaltsverzeichnis |
| Item Description: | Literaturangaben |
| Physical Description: | 292 S. Ill., graph. Darst. : 24 cm |
| ISBN: | 3000063951 |
Staff View
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV013982946 | ||
| 003 | DE-604 | ||
| 005 | 20030814 | ||
| 007 | t | ||
| 008 | 011023s2001 gw ad|| |||| 00||| eng d | ||
| 016 | 7 | |a 962804738 |2 DE-101 | |
| 020 | |a 3000063951 |9 3-00-006395-1 | ||
| 035 | |a (OCoLC)51994963 | ||
| 035 | |a (DE-599)BVBBV013982946 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 044 | |a gw |c DE | ||
| 049 | |a DE-M347 |a DE-703 |a DE-1046 |a DE-29T |a DE-522 | ||
| 082 | 0 | |a 621.3663 |2 21 | |
| 084 | |a UH 5628 |0 (DE-625)145673: |2 rvk | ||
| 245 | 1 | 0 | |a Excimer laser technology |b laser sources, optics, systems and applications |c ed.: Dirk Basting |
| 250 | |a 1. ed. | ||
| 264 | 1 | |a Göttingen |b Lambda Physik |c 2001 | |
| 300 | |a 292 S. |b Ill., graph. Darst. : 24 cm | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Literaturangaben | ||
| 650 | 4 | |a Excimer lasers | |
| 650 | 0 | 7 | |a Excimerlaser |0 (DE-588)4153300-8 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Excimerlaser |0 (DE-588)4153300-8 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Basting, Dirk |e Sonstige |4 oth | |
| 856 | 4 | 2 | |m DNB Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009572085&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 943 | 1 | |a oai:aleph.bib-bvb.de:BVB01-009572085 | |
Record in the Search Index
| _version_ | 1807683069944004608 |
|---|---|
| adam_text |
TABLE
OF
CONTENTS
1.
INTRODUCTION
15
G.
MAROWSKY
1.1
THE
DEVELOPMENT
OF
EXCIMER
LASER
TECHNOLOGY
17
1.1.1
REFERENCES
21
1.1.2
RELATED
LITERATURE
22
2.
FUNDAMENTALS
23
2.1
INTRODUCTION
TO
LASER
PHYSICS
AND
EXCIMER
LASER
SOURCES
25
K.
KORBER
2.1.1
THE
WAVE-PARTICLE
DUALITY
OF
LIGHT
25
2.1.2
ELECTROMAGNETIC
RADIATION
25
2.1.3
SPONTANEOUS
AND
STIMULATED
EMISSION
27
2.1.3.1
NEED
OF
POPULATION
INVERSION
28
2.1.4
PRINCIPLE
DESIGN
OF
A
LASER
30
2.1.5
TYPES
OF
LASERS
31
2.1.6
PRINCIPLE
OF
EXCIMER
LASERS
33
2.1.7
F
2
LASER
OPERATION
37
P.
R.
HERMAN,
G.
MAROWSKY,
P.
SIMON
2.1.7.1
PUMPING
37
2.1.8
DESIGN
AND
KEY-COMPONENTS
OF
EXCIMER
LASERS
38
2.1.8.1
EXCITATION
38
2.1.8.2
PREIONIZATION
40
2.1.8.3
DISCHARGE
CIRCUITS
40
2.1.8.4
LASER
GAS
COOLING,
VENTILATION
AND
CLEANING
44
2.1.8.5
LASER
BEAM
CHARACTERIZATION
45
P.
R.
HERMAN,
K.
MANN
2.1.9
INTERACTION
OF
EXCIMER
LASER
RADIATION
WITH
SOLIDS
57
2.1.10
REFERENCES
59
2.2
INTRODUCTION
TO
LASER
RELATED
OPTICS
61
H.-J.
KAHLERT
2.2.1
REFRACTION
AND
POLARIZATION
OF
LIGHT
61
2.2.2
PRISMS
64
2.2.3
LENSES
66
2.2.3.1
SPHERICAL
ABERRATION
68
2.2.3.2
CHROMATIC
ABERRATION
68
2.2.3.3
ASTIGMATISM
69
2.2.3.4
COMA
69
2.2.4
DIFFRACTION
AND
RESOLUTION
70
2.2.5
LENS
SYSTEMS
74
2.3
UV
OPTICS
SYSTEMS
FOR
EXCIMER
LASERS
77
H.-J.
KAHLERT
2.3.1
SUBSTRATE
MATERIALS
77
2.3.2
METAL
AND
DIELECTRIC
MIRRORS
79
2.3.3
ATTENUATORS
82
2.3.4
DAMAGE
THRESHOLDS
84
2.3.5
OPTICAL
BEAM
PATH
LAYOUT
86
2.3.6
BEAM
FORMING
TELESCOPE
OPTICS
87
2.3.7
HOMOGENIZER
AND
FIELD
LENS
87
2.3.8
PROJECTION
LENSES
89
2.3.9
HIGH
PRECISION
UV-OPTICS
SYSTEMS
91
2.3.10
OPTICAL
SUB-SYSTEM
FOR
INK
JET
NOZZLE
PROCESSING
93
3.
APPLICATIONS
95
3.1
OVERVIEW
97
M.
WEHNER
3.1.1
REFERENCES
104
3.2
ABLATION
107
M.
WEHNER
3.2.1
REFERENCES
112
3.3
MICROLITHOGRAPHY
113
M.
WEHNER
3.3.1
THE
PATTERNING
PROCESS
113
3.3.2
OPTICAL
RESOLUTION
114
3.3.3
OPTICAL
MATERIALS
116
3.3.4
TECHNOLOGY
ROADMAP
118
3.3.5
REFERENCES
123
3.4
TFT
ANNEALING
125
M.
FIEBIG
3.4.1
ELECTRON
MOBILITY
INCREASES
WITH
GRAIN
SIZE
128
3.4.2
LAYER
STRATIFICATION,
NEAR
AND
COMPLETE
MELT-THROUGH
130
3.4.3
EXCIMER
LASER
BASED
ANNEALING
SYSTEM
132
3.4.4
OUTLOOK
134
3.4.5
REFERENCES
134
10
3.5
FIBER
BRAGG
GRATINGS
K.
KORBER
135
3.5.1
INTRODUCTION
TO
FIBER
BRAGG
GRATINGS
135
3.5.2
MANUFACTURING
OF
FIBER
BRAGG
GRATINGS
136
3.5.2.1
INTERFEROMETRIC
METHOD
137
3.5.2.2
PHASE
MASK
METHOD
138
3.5.2.3
USE
OF
EXCIMER
LASERS
FOR
FBG
INSCRIBING
139
3.5.3
APPLICATIONS
FOR
FIBER
BRAGG
GRATINGS
140
3.5.4
REFERENCES
144
3.6
MICRO
FABRICATION
M.
WEHNER
145
3.6.1
PROCESSING
TECHNIQUES
146
3.6.2
REMOVAL
OF
THIN
LAYERS
151
3.6.3
DRILLING
153
3.6.3.1
POLYMERS
158
3.6.3.2
CERAMICS
AND
GLASS
161
3.6.3.3
METALS
165
3.6.4
MACHINING
OF
THREE-DIMENSIONAL
STRUCTURES
166
3.6.5
ABLATION
AT
157NM
P.
R.
HERMAN,
J.
IHLEMANN,
K.
KORBER
169
3.6.5.1
INTRODUCTION
169
3.6.5.2
BEAM
DELIVERY
CONCEPTS
170
3.6.5.3
ADVANCED
15NM
MICROMACHINING
SYSTEMS
170
3.6.5.4
POLYMERS
171
3.6.5.5
PTFE
(TEFLON)
171
3.6.5.6
FUSED
SILICA
AND
SAPPHIRE
172
3.6.5.7
FURTHER
APPLICATIONS
173
3.6.6
REFERENCES
173
3.7
VIA
DRILLING
M.
HEBLING
177
3.7.1
INTRODUCTION
177
3.7.2
BASICS
177
3.7.3
APPLICATIONS
182
3.7.3.1
VIAS
IN
MICROELECTRONICS
182
3.7.3.2
OTHER
APPLICATIONS
186
3.7.4
REFERENCES
187
3.8
INK
JET
NOZZLE
DRILLING
M.
WEHNER
189
3.8.1
REFERENCES
192
11
3.9
MARKING
M.
WEHNER
193
3.9.1
REFERENCES
199
3.10
MEDICAL
APPLICATIONS
OF
EXCIMER
LASERS
H.
LUBATSCHOWSKI
201
3.10.1
REFRACTIVE
LASER
SURGERY
201
3.10.1.1
PHOTO
REFRACTIVE
KERATECTOMY
(PRK)
202
3.10.1.2
PHOTO
THERAPEUTIC
KERATECTOMY
(PTK)
204
3.10.1.3
LASER
IN
SITU
KERATOMILEUSIS
(LASIK)
205
3.10.1.4
CUSTOMIZED
ABLATION
206
3.10.2
GLAUCOMA
SURGERY
208
3.10.3
LASER
ANGIOPLASTY
210
3.10.4
REFERENCES
211
3.11
MEASUREMENT
TECHNIQUES
D.
WANDT
215
3.11.1
REFERENCES
224
4.
LAMBDA
PHYSIK
EXCIMER
LASERS
227
4.1
OVERVIEW
K.
KORBER
229
4.2
NOVALINE
SERIES
231
K.
KORBER,
R.
PATZEL
4.2.1
HOUSING
233
4.2.2
LASER
DISCHARGE
UNIT
233
4.2.2.1
LASER
TUBE
(NOVATUBE)
234
4.2.2.2
NOVAPOWERSWITCHYY
236
4.2.3
OPTICS
MODULES
238
4.2.4
MONITOR,
TRACKING
AND
WAVELENGTH
CALIBRATION
MODULES
240
4.2.5
CONTROL
SYSTEM
241
4.2.6
HIGH
VOLTAGE
SYSTEM
241
4.2.7
GAS
SYSTEM
242
4.2.8
COOLING
SYSTEM
244
4.2.9
PURGE
GAS
SYSTEM
246
4.2.10
MAINTENANCE
SCHEDULE
248
4.2.10.1
EXAMPLE
OF
MAINTENANCE
PROCEDURE
249
4.3
LAMBDA
STEELYY
SERIES
M.
FIEBIG
251
4.3.1
LASER
TUBE
ELECTRICAL
CIRCUIT
AND
RESONATOR
252
4.3.2
BEAM
SHIELDS
AND
BEAM
SHUTTER
255
4.3.3
LASER
CONTROL
256
4.3.4
ENERGY
MEASUREMENT
AND
STABILITY
257
4.3.5
SIMPLIFIED
MAINTENANCE
258
4.3.6
SECURITY
AND
DIAGNOSTICS
259
4.3.7
CONCLUSION
259
4.3.8
REFERENCES
260
4.4
L1-FBG
K.
KORBER
261
4.4.1
IMPROVED
SPATIAL
COHERENCE
261
4.4.2
IMPROVED
FLAT
TOP
BEAM
INTENSITY
DISTRIBUTION
263
4.4.3
IMPROVED
LONG
AND
SHORT
TERM
POINTING
STABILITY
264
4.4.4
PULSE-TO-PULSE
ENERGY
STABILITY
265
4.4.5
REFERENCES
265
4.5
LPX
SERIES
M.
FIEBIG
267
4.5.1
OPTICAL
BEAM
CHARACTERISTICS
268
4.5.2
CONTROL
UNIT
269
4.6
LPFYY
SERIES
M.
FIEBIG
271
4.6.1
F
2
LASER
SOURCE
271
4.6.2
REFERENCES
274
4.7
COMPEX
SERIES
K.
KORBER
275
4.7.1
COMPEX
100/200
SERIES
275
4.7.2
COMPEX
150
SERIES
276
4.8
OPTEX
K.
KORBER
279
5.
OUTLOOK
M.
RAHE
281
6.
ABBREVIATIONS
285
7.
INDEX
289
13 |
| any_adam_object | 1 |
| building | Verbundindex |
| bvnumber | BV013982946 |
| classification_rvk | UH 5628 |
| ctrlnum | (OCoLC)51994963 (DE-599)BVBBV013982946 |
| dewey-full | 621.3663 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3663 |
| dewey-search | 621.3663 |
| dewey-sort | 3621.3663 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 1. ed. |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00000nam a2200000 c 4500</leader><controlfield tag="001">BV013982946</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20030814</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">011023s2001 gw ad|| |||| 00||| eng d</controlfield><datafield tag="016" ind1="7" ind2=" "><subfield code="a">962804738</subfield><subfield code="2">DE-101</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3000063951</subfield><subfield code="9">3-00-006395-1</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)51994963</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV013982946</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">gw</subfield><subfield code="c">DE</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-M347</subfield><subfield code="a">DE-703</subfield><subfield code="a">DE-1046</subfield><subfield code="a">DE-29T</subfield><subfield code="a">DE-522</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3663</subfield><subfield code="2">21</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UH 5628</subfield><subfield code="0">(DE-625)145673:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Excimer laser technology</subfield><subfield code="b">laser sources, optics, systems and applications</subfield><subfield code="c">ed.: Dirk Basting</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">1. ed.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Göttingen</subfield><subfield code="b">Lambda Physik</subfield><subfield code="c">2001</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">292 S.</subfield><subfield code="b">Ill., graph. Darst. : 24 cm</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Literaturangaben</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Excimer lasers</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Excimerlaser</subfield><subfield code="0">(DE-588)4153300-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Excimerlaser</subfield><subfield code="0">(DE-588)4153300-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Basting, Dirk</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">DNB Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009572085&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="943" ind1="1" ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-009572085</subfield></datafield></record></collection> |
| id | DE-604.BV013982946 |
| illustrated | Illustrated |
| indexdate | 2024-08-18T00:28:35Z |
| institution | BVB |
| isbn | 3000063951 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009572085 |
| oclc_num | 51994963 |
| open_access_boolean | |
| owner | DE-M347 DE-703 DE-1046 DE-29T DE-522 |
| owner_facet | DE-M347 DE-703 DE-1046 DE-29T DE-522 |
| physical | 292 S. Ill., graph. Darst. : 24 cm |
| publishDate | 2001 |
| publishDateSearch | 2001 |
| publishDateSort | 2001 |
| publisher | Lambda Physik |
| record_format | marc |
| spelling | Excimer laser technology laser sources, optics, systems and applications ed.: Dirk Basting 1. ed. Göttingen Lambda Physik 2001 292 S. Ill., graph. Darst. : 24 cm txt rdacontent n rdamedia nc rdacarrier Literaturangaben Excimer lasers Excimerlaser (DE-588)4153300-8 gnd rswk-swf Excimerlaser (DE-588)4153300-8 s DE-604 Basting, Dirk Sonstige oth DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009572085&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Excimer laser technology laser sources, optics, systems and applications Excimer lasers Excimerlaser (DE-588)4153300-8 gnd |
| subject_GND | (DE-588)4153300-8 |
| title | Excimer laser technology laser sources, optics, systems and applications |
| title_auth | Excimer laser technology laser sources, optics, systems and applications |
| title_exact_search | Excimer laser technology laser sources, optics, systems and applications |
| title_full | Excimer laser technology laser sources, optics, systems and applications ed.: Dirk Basting |
| title_fullStr | Excimer laser technology laser sources, optics, systems and applications ed.: Dirk Basting |
| title_full_unstemmed | Excimer laser technology laser sources, optics, systems and applications ed.: Dirk Basting |
| title_short | Excimer laser technology |
| title_sort | excimer laser technology laser sources optics systems and applications |
| title_sub | laser sources, optics, systems and applications |
| topic | Excimer lasers Excimerlaser (DE-588)4153300-8 gnd |
| topic_facet | Excimer lasers Excimerlaser |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=009572085&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT bastingdirk excimerlasertechnologylasersourcesopticssystemsandapplications |