MEMS & microsystems: design and manufacture
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Boston [u.a.]
McGraw-Hill
2002
|
| Edition: | International ed. |
| Subjects: | |
| Physical Description: | XII, 436 S. Ill., graph. Darst. |
| ISBN: | 0071130519 0072393912 |
Staff View
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Record in the Search Index
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| author | Hsu, Tai-Ran |
| author_facet | Hsu, Tai-Ran |
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| ctrlnum | (OCoLC)248156737 (DE-599)BVBBV013979213 |
| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Technik Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | International ed. |
| format | Book |
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| id | DE-604.BV013979213 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T18:55:30Z |
| institution | BVB |
| isbn | 0071130519 0072393912 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-009569305 |
| oclc_num | 248156737 |
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| owner | DE-703 DE-29T DE-1043 DE-91 DE-BY-TUM |
| owner_facet | DE-703 DE-29T DE-1043 DE-91 DE-BY-TUM |
| physical | XII, 436 S. Ill., graph. Darst. |
| publishDate | 2002 |
| publishDateSearch | 2002 |
| publishDateSort | 2002 |
| publisher | McGraw-Hill |
| record_format | marc |
| spelling | Hsu, Tai-Ran Verfasser aut MEMS & microsystems design and manufacture Tai-Ran Hsu MEMS and microsystems International ed. Boston [u.a.] McGraw-Hill 2002 XII, 436 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Microelectromechanical systems Microelectronics MEMS (DE-588)4824724-8 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf Mikromechanik (DE-588)4205811-9 s DE-604 MEMS (DE-588)4824724-8 s Mikrosystemtechnik (DE-588)4221617-5 s 1\p DE-604 Mikroelektronik (DE-588)4039207-7 s 2\p DE-604 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Hsu, Tai-Ran MEMS & microsystems design and manufacture Microelectromechanical systems Microelectronics MEMS (DE-588)4824724-8 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd Mikroelektronik (DE-588)4039207-7 gnd Mikromechanik (DE-588)4205811-9 gnd |
| subject_GND | (DE-588)4824724-8 (DE-588)4221617-5 (DE-588)4039207-7 (DE-588)4205811-9 |
| title | MEMS & microsystems design and manufacture |
| title_alt | MEMS and microsystems |
| title_auth | MEMS & microsystems design and manufacture |
| title_exact_search | MEMS & microsystems design and manufacture |
| title_full | MEMS & microsystems design and manufacture Tai-Ran Hsu |
| title_fullStr | MEMS & microsystems design and manufacture Tai-Ran Hsu |
| title_full_unstemmed | MEMS & microsystems design and manufacture Tai-Ran Hsu |
| title_short | MEMS & microsystems |
| title_sort | mems microsystems design and manufacture |
| title_sub | design and manufacture |
| topic | Microelectromechanical systems Microelectronics MEMS (DE-588)4824724-8 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd Mikroelektronik (DE-588)4039207-7 gnd Mikromechanik (DE-588)4205811-9 gnd |
| topic_facet | Microelectromechanical systems Microelectronics MEMS Mikrosystemtechnik Mikroelektronik Mikromechanik |
| work_keys_str_mv | AT hsutairan memsmicrosystemsdesignandmanufacture AT hsutairan memsandmicrosystems |